WorldCat Identities

Quate, Calvin F. 1923-

Works: 93 works in 174 publications in 1 language and 597 library holdings
Roles: Author, Editor, Contributor, Other
Classifications: QH212.S33, 502.82
Publication Timeline
Most widely held works about Calvin F Quate
Most widely held works by Calvin F Quate
Bringing scanning probe microscopy up to speed by S. C Minne( Book )

8 editions published in 1999 in English and held by 142 WorldCat member libraries worldwide

"Bringing Scanning Probe Microscopy up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold
Scanning probe lithography by Hyongsok T Soh( Book )

7 editions published between 2001 and 2011 in English and held by 126 WorldCat member libraries worldwide

Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters. In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology
Selected papers on scanning acoustic microscopy( Book )

4 editions published in 1992 in English and held by 69 WorldCat member libraries worldwide

Acoustic microscopy at cryogenic temperatures by Stanford University( Book )

9 editions published between 1978 and 1984 in English and held by 8 WorldCat member libraries worldwide

During this six month period we completed construction of a mechanical scanning device compatible with our dilution refrigerator and suitable for use at very low temperatures. This device has now been thoroughly tested and was used to record our first acoustic images in liquid helium at temperatures below 0.1 K. This report describes the design of the mechanical scanner and presents the first micrographs taken in this new regime of imaging. We also present theoretical results which account for much of the nonlinear imaging behavior described in the previous status report. In particular we investigate the theory of resolution improvement when high acoustic intensities are used, and quantitatively account for the onset of nonlinear excess attenuation. (Author)
Innovative measurement technology for the semiconductor device industry - "the acoustic microscope - a new instrument for viewing integrated circuits." by Stanford University( Book )

5 editions published between 1976 and 1977 in English and held by 5 WorldCat member libraries worldwide

Acoustic Microscopy for Nondestructive Evaluation of Materials( Book )

5 editions published between 1979 and 1981 in English and held by 5 WorldCat member libraries worldwide

This report covers the results of a research program on acoustic microscopy directed toward the study of integrated circuits and solid materials. This new type of microscopy permits one to examine microscopic features that are unaccessible in the optical microscope. Thus detail beneath metallization layers as well as the grain boundaries in polished samples can be examined without resorting to chemical etching. Adhesion of thin film is a field where acoustic microscopy will play an important role. Photoacoustic imaging is emerging as a key element in the study of thermal properties of materials and some initial results in this area are included. (Author)
Imaging of sound waves by Stanford University( Book )

4 editions published between 1972 and 1974 in English and held by 4 WorldCat member libraries worldwide

Superconducting power transmission lines by Stanford University( Book )

4 editions published between 1974 and 1975 in English and held by 4 WorldCat member libraries worldwide

Study of Nonlinear Acoustics for the Purpose of Processing 'Sophisticated Signals' by Stanford University( Book )

4 editions published between 1974 and 1977 in English and held by 4 WorldCat member libraries worldwide

The nonlinear interaction between two surface acoustic waves can be used in a number of signal processing devices. In this report the principles which underlie this interaction are developed both theoretically and experimentally. In the signal processing devices it is demonstrated that both convolution and fourier transformations can be carried out in real time. In the imaging work it is shown that acoustic surface waves can be used to scan optical images which are projected onto a semiconducting layer of silicon. This scanning process transfers spatial image pattern into a temporal pattern which can be transmitted electrically to a remote display station. (Modified author abstract)
Electronically focused acoustic imaging device by Stanford University( Book )

3 editions published in 1973 in English and held by 3 WorldCat member libraries worldwide

We describe in this paper a new technique for processing acoustic information from a piezoelectric array. The device we shall describe is capable of presenting dynamic, nearly real time images of acoustic objects whether they be internal body organs in medical applications, wreakage in the sea, or flaws in nondestructive testing. The present device is capable of 1 mm resolution at distances of 20 cm and operates without the use of external focusing element or an intermediary hologram. In the experimental results reported here two dimensional images are obtained using electronic scanning in one dimension and mechanical scanning in the other dimension. We will describe near the end of this paper how a fully electronic two dimensional scan may be implemented. The sensitivity of the imaging apparatus is expected to be sufficient to insure low sound power levels while still obtaining high quality images. (Author)
Tunneling Acoustic Microscopy by Calvin F Quate( Book )

4 editions published between 1991 and 1993 in English and held by 3 WorldCat member libraries worldwide

We have integrated silicon micromachining techniques with piezoelectric thin film deposition to make a near-field acoustic microscope. A piezoelectric zinc oxide (ZnO) transducer is deposited on a substrate of 7740 glass. A sharp tip is formed in a silicon wafer which is anodically bonded to the glass substrate. A sample is attached to substrate of glass with a receiving ZnO transducer. The transducer on the tip excites an ultrasonic beam which passes from the tip to the sample and is detected by the receiving transducer. A feedback signal is generated to keep the transmitted amplitude constant as a sample is raster scanned. The feedback signal is applied to a tube scanner and is also used to modulate the intensity of a display monitor. We find that the instrument has a vertical height sensitivity of about 20 Angstroms and a lateral resolution of better than 800 Angstroms
Research on Cryogenic Vacuum Tunneling( Book )

3 editions published between 1986 and 1987 in English and held by 3 WorldCat member libraries worldwide

The Scanning Tunneling Microscope has been immersed in liquid helium and used to image the surface of graphite with atomic resolution. The instrument has been reduced in size and this makes it possible to scan at high rates and to operate without a system for vibration isolation. It has been possible to record the phonon spectrum of graphite and the vibrational spectra of sorbic acid using the miniaturized instrument. Keywords: Cryogenic; Tube scanner; Graphite; Phonon spectra; Vacuum tunneling; Real time imaging
New acoustic imaging device by Stanford University( Book )

3 editions published in 1973 in English and held by 3 WorldCat member libraries worldwide

Microwave research by Stanford University( Book )

4 editions published between 1968 and 1974 in English and held by 3 WorldCat member libraries worldwide

Contents: Acoustic Tactile Sensing, Video Bandwidth Compression, Rotation Sensing, Fourier Transforms, Signal Processing, Acoustical Images, High Power Lasers, Phospholipid Vesicles, Optical Radar, and Acoustic Waveguides
The coupled modes of acoustic waves and drifting carriers in piezoelectric crystals by Kjell Blötekjaer( Book )

2 editions published in 1963 in English and held by 3 WorldCat member libraries worldwide

The amplification of acoustic waves in piezoelectric semiconductors is analyzed in terms of the normal modes of the uncoupled system. The characteristics of the growing wave are presented for a range of the crystal parameters in terms of the conduction frequency and the diffusion frequency. Boundary conditions are worked out to show that an acoustic wave at the input to the amplifying section will couple into the growing wave without appreciable initial loss. The experimental results with CdS at 600 Mc confirm the general features of the theory and serve to point out two problems which must be overcome. The first is one of coupling into the acoustic waves from an external source. Present methods are quite inefficient. The second is one of internal oscillations within the crystal which occur when the drift velocity exceeds the velocity of sound. If these problems can be overcome, it should be possible to use this gain mechanism well into the microwave region
Joint Services Electronics Program( Book )

4 editions published between 1985 and 1990 in English and held by 3 WorldCat member libraries worldwide

The central theme of our work at Ginzton is the development of new material and device technologies, along with novel techniques for characterization and measurement, that will allow ultra-high speed electronic and optical processing of information. The different work units of this proposal interconnect the physics and technology of linear and nonlinear optical materials and fibers with new measurement tools which provide unprecedented spatial and temporal resolution. The following paragraphs summarize each of these work units. Professor Bloom's work has been concerned with developing laser techniques for obtaining both time and frequency domain measurements of high speed electrical circuits. The overall objective of Professor Byer's program is the growth, fabrication and characterization of single crystal optical fibers. During the last year and a half Professor Kino has re-directed his efforts from the study of very high frequency acousto-optic taps for optical fibers, to the development of a new type of real-time scanning optical microscope. Professor Quate's work is aimed at developing the technology and studying the applications of the Scanning Tunneling Microscope and the Atomic Force Microscope, both of which allow unprecedented imaging on an atomic scale
Scanning acoustic microscope by Stanford University( Book )

3 editions published between 1973 and 1979 in English and held by 2 WorldCat member libraries worldwide

Scanning Tunneling Microscopy of Semiconductor Surfaces( Book )

5 editions published between 1988 and 1993 in English and held by 2 WorldCat member libraries worldwide

This is a summary of results from a program aimed at studying the atomic structure of semiconductor surfaces using scanning tunneling microscopy (STM). The bulk of the research concerned the epitaxial growth of metals on the (111) and the (100) surfaces of silicon, with particular emphasis on the metals indium and gallium. The STM images provided structural information on all of the metal-induced surface reconstructions in these systems as well as information on the general behavior of the metals on the Si surface, yielding insight into metal mobility, the effect of stepped substrates, and the nucleation of metal growth on the surface. In addition to the semiconductor surface work, there has been some studies of the epitaxial growth of metals on Au(111), and the surface structure of the high temperature superconductor Bi2Sr2CaCu2O8+8. Keywords: Semiconductor surfaces, Scanning tunneling microscopy, Silicon, Metal surfaces, Epitaxial growth, Superconductors. (JES)
Sub-Micron Lithography with the Atomic Force Microscope( Book )

4 editions published between 1998 and 2000 in English and held by 2 WorldCat member libraries worldwide

We investigated methods for fabricating nanoscale devices with feature sizes below 100 nm. It was based on scanning probes as fabricated in our own facility. It was known from the beginning that the intense field at the tip of the probe could be used to selectively oxidize silicon if it was first passivated with hydrogen. It is a lithographic process since the oxidized regions serve as the etch mask when the pattern is transferred into the substrate. We investigated other methods of patterning. The major effort was the exposure of electron resist with electrons field emitted from the tip. We determined that there was no proximity effect in Scanning Probe Lithography. In later work we able to pattern very narrow lines. With electron resist we were successful in writing lines as narrow as 26 nm. With oxidation of Titanium films (and with the use of carbon nanotubes for tips) we were successful in writing lines 6 nm in width. We, also, improved the throughput by increasing the writing speed and writing with parallel arrays of probes
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Audience level: 0.70 (from 0.65 for Scanning p ... to 0.99 for Acoustic M ...)

Bringing scanning probe microscopy up to speed
Alternative Names
Calvin Quate Amerikaans ingenieur

Calvin Quate amerikansk ingeniør

Calvin Quate amerikansk ingenjör

Calvin Quate US-amerikanischer Ingenieur

Quate, C.F.

Quate, C. F. 1923-

Quate, C. F. (Calvin F.), 1923-

Куэйт, Келвин

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English (86)

Scanning probe lithography