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Physical vapor deposition of thin films
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Physical vapor deposition of thin films

Author: John E Mahan
Publisher: New York : Wiley, ©2000.
Edition/Format: Book : EnglishView all editions and formats
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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: John E Mahan
ISBN: 0471330019 9780471330011
OCLC Number: 40954144
Notes: "A Wiley-Interscience publication."
Description: xiii, 312 p. : ill. (some col.) ; 24 cm.
Responsibility: John E. Mahan.
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