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  E-mail Message: I thought you might be interested in this item at http://www.worldcat.org/oclc/46822335 Title: Handbook of silicon semiconductor metrology Author: A C Diebold Publisher: New York : Marcel Dekker, 2001. ISBN/ISSN: 0824705068 9780824705060 0203904540 9780203904541 OCLC:46822335

  
  

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Handbook of silicon semiconductor metrology