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  E-mail Message: I thought you might be interested in this item at http://www.worldcat.org/oclc/71581976 Title: Microlithography : science and technology Author: Kazuaki Suzuki; Bruce W Smith Publisher: Boca Raton : CRC Press, ©2007. ISBN/ISSN: 9780824790240 0824790243 OCLC:71581976

  
  

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