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| Document Type: | Book |
|---|---|
| All Authors / Contributors: |
H Bernhard Pogge |
| ISBN: | 0824796322 9780824796327 |
| OCLC Number: | 33131598 |
| Description: | xiii, 623 p. : ill. ; 24 cm. |
| Contents: | Electronic products / Michael A. Fury -- Electronic processes and environment / Robert K. Lowry -- Chemical vapor deposition for epitaxial growth / Thomas F. Kuech -- Chemical vapor deposition of crystalline and amorphous carbon, silicon, and germanium films / Peter Hess -- Depositions and reactions of metals and metal compounds / Roy G. Gordon -- Photolithography / Alois Gutmann -- The chemistry of plasma etching / Demetre J. Economou -- Electrochemistry of corrosion : principles and protection / Vlasta Brusic --Micro and nano analysis of materials / Homi Fatemi -- Polyimides as dielectrics and optical interconnects / Tohru Matsuura -- Ceramic materials / Charles H. Perry -- Chemistry of the new superconductors / Frank J. Adrian -- Fuel cells / Nguyen Q. Minh. |
| Responsibility: | edited by H. Bernhard Pogge. |
| More information: |
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