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Electronic materials chemistry
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Electronic materials chemistry

Author: H Bernhard Pogge
Publisher: New York : Marcel Dekker, ©1996.
Edition/Format: Book : EnglishView all editions and formats
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Document Type: Book
All Authors / Contributors: H Bernhard Pogge
ISBN: 0824796322 9780824796327
OCLC Number: 33131598
Description: xiii, 623 p. : ill. ; 24 cm.
Contents: Electronic products / Michael A. Fury -- Electronic processes and environment / Robert K. Lowry -- Chemical vapor deposition for epitaxial growth / Thomas F. Kuech -- Chemical vapor deposition of crystalline and amorphous carbon, silicon, and germanium films / Peter Hess -- Depositions and reactions of metals and metal compounds / Roy G. Gordon -- Photolithography / Alois Gutmann -- The chemistry of plasma etching / Demetre J. Economou -- Electrochemistry of corrosion : principles and protection / Vlasta Brusic --Micro and nano analysis of materials / Homi Fatemi -- Polyimides as dielectrics and optical interconnects / Tohru Matsuura -- Ceramic materials / Charles H. Perry -- Chemistry of the new superconductors / Frank J. Adrian -- Fuel cells / Nguyen Q. Minh.
Responsibility: edited by H. Bernhard Pogge.
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