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Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA
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Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA

Author: David F Kyser; et al
Publisher: AMF O'Hare [Chicago], IL : Scanning Electron Microscopy, Inc., ©1984.
Edition/Format: Book : Conference publication : English
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Material Type: Conference publication
Document Type: Book
All Authors / Contributors: David F Kyser; et al
ISBN: 0931288304 9780931288302
OCLC Number: 10528914
Description: xii, 372 p. : ill. ; 29 cm.
Responsibility: edited by David F. Kyser ... [et al.] ; managing editor, Daniel Halibey.

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