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A study on reactive ion etching of barium strontium titanate films using mixtures of argon (Ar), carbon tetrafluoride (CF4), and sulfur hexafluoride (SF6)

Author: Samuel G Hirsch; U.S. Army Research Laboratory,
Publisher: Aberdeen Proving Ground, MD : Army Research Laboratory, July 2014.
Series: ARL-TR (Aberdeen Proving Ground, Md.), 6979.
Edition/Format:   eBook : Document : National government publication : English
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Material Type: Document, Government publication, National government publication, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Samuel G Hirsch; U.S. Army Research Laboratory,
OCLC Number: 922543204
Notes: Title from title screen (viewed Sept. 29, 2015).
"July 2014."
Description: 1 online resource (iv, 7 pages) : illustrations.
Series Title: ARL-TR (Aberdeen Proving Ground, Md.), 6979.
Responsibility: Samuel G. Hirsch [and four others].

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