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Advanced metallization and interconnect systems for ULSI applications in 1997 : proceedings of the conference held September 30-October 2,1997, in San Diego, California, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 21-22, 1997, in Tokyo, Japan Preview this item
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Advanced metallization and interconnect systems for ULSI applications in 1997 : proceedings of the conference held September 30-October 2,1997, in San Diego, California, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 21-22, 1997, in Tokyo, Japan

Author: Robin Cheung; University of California, Berkeley. Continuing Education in Engineering.; et al
Publisher: Warrendale, Pa. : Materials Research Society, ©1998.
Series: Materials Research Society conference proceedings.
Edition/Format:   Book : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Robin Cheung; University of California, Berkeley. Continuing Education in Engineering.; et al
ISBN: 1558994122 9781558994126
OCLC Number: 39051019
Description: xviii, 765 p. : ill. ; 24 cm.
Series Title: Materials Research Society conference proceedings.
Responsibility: editors, Robin Cheung ... [et al.].

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