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Advanced metallization for ULSI applications, 1992 : proceedings of the conference held October 20-22, 1992, in Tempe, Arizona

Author: Timothy S Cale; Fabio S Pintchovski; R S Blewer; University of California, Berkeley. Continuing Education in Engineering.
Publisher: Pittsburgh, Pa. : Materials Research Society., ©1993.
Series: Materials Research Society conference proceedings.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Tempe (Ariz., 1992)
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Timothy S Cale; Fabio S Pintchovski; R S Blewer; University of California, Berkeley. Continuing Education in Engineering.
ISBN: 1558991921 9781558991927
OCLC Number: 27975761
Description: xiii, 404 pages : illustrations ; 23 cm.
Series Title: Materials Research Society conference proceedings.
Responsibility: sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, California, U.S.A. ; editors, Timothy S. Cale, Fabio S. Pintchovski ; associate editors, Robert S. Blewer [and others].

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Primary Entity

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