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Advanced metallization for ULSI applications for 1994 : proceedings of the conference held October 4-6, 1994 in Austin, Texas, U.S.A.

Author: Roc Blumenthal; Guido Janssen; University of California, Berkeley. Continuing Education in Engineering.
Publisher: Pittsburgh, Pa. : Materials Research Society, ©1995.
Series: Materials Research Society conference proceedings.
Edition/Format:   Book : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Roc Blumenthal; Guido Janssen; University of California, Berkeley. Continuing Education in Engineering.
ISBN: 1558992790 9781558992795
OCLC Number: 31934159
Notes: "Papers presented at the Advanced Metallization for ULSI Application Conference"--Pref.
"Sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California U.S.A."
Description: xv, 564 p. : ill. ; 24 cm.
Series Title: Materials Research Society conference proceedings.
Responsibility: editors, Roc Blumenthal, Guido Janssen.
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