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Advanced metallization for ULSI applications in 1993 : proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. Preview this item
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Advanced metallization for ULSI applications in 1993 : proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A.

Author: David P Favreau; Yosi Shacham-Diamand; Yasuhiro Horiike; University of California, Berkeley. Continuing Education in Engineering.
Publisher: Pittsburgh, PA : Materials Research Society, ©1994.
Series: Materials Research Society conference proceedings.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Database:WorldCat
Summary:

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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Genre/Form: Conference proceedings
Congresses
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: David P Favreau; Yosi Shacham-Diamand; Yasuhiro Horiike; University of California, Berkeley. Continuing Education in Engineering.
ISBN: 1558992359 9781558992351
OCLC Number: 29753369
Description: xv, 611 pages : illustrations ; 24 cm.
Series Title: Materials Research Society conference proceedings.
Responsibility: editors, David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike.

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Primary Entity

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