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Advanced metallization for ULSI applications in 1993 : proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. Preview this item
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Advanced metallization for ULSI applications in 1993 : proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A.

Author: David P Favreau; Yosi Shacham-Diamand; Yasuhiro Horiike; University of California, Berkeley. Continuing Education in Engineering.
Publisher: Pittsburgh, PA : Materials Research Society, ©1994.
Series: Materials Research Society conference proceedings.
Edition/Format:   Book : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: David P Favreau; Yosi Shacham-Diamand; Yasuhiro Horiike; University of California, Berkeley. Continuing Education in Engineering.
ISBN: 1558992359 9781558992351
OCLC Number: 29753369
Description: xv, 611 p. : ill. ; 24 cm.
Series Title: Materials Research Society conference proceedings.
Responsibility: editors, David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike.
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<http://www.worldcat.org/oclc/29753369>
library:oclcnum"29753369"
library:placeOfPublication
library:placeOfPublication
owl:sameAs<info:oclcnum/29753369>
rdf:typeschema:Book
schema:about
schema:about
<http://id.loc.gov/authorities/subjects/sh94000436>
rdf:typeschema:Intangible
schema:name"Integrated circuits--Ultra large scale integration--Materials"@en
schema:about
<http://id.worldcat.org/fast/1017885>
rdf:typeschema:Intangible
schema:name"Integrated circuits--Ultra large scale integration--Materials."@en
schema:name"Metallic films"@en
schema:about
<http://id.worldcat.org/fast/975598>
rdf:typeschema:Intangible
schema:name"Electrochemical metallizing."@en
schema:name"Integrated circuits--Ultra large scale integration--Materials"@en
schema:about
schema:about
schema:about
schema:about
schema:about
schema:about
schema:about
schema:about
schema:about
schema:about
schema:contributor
schema:contributor
<http://viaf.org/viaf/268119822>
rdf:typeschema:Organization
schema:name"University of California, Berkeley. Continuing Education in Engineering."
schema:contributor
schema:contributor
schema:copyrightYear"1994"
schema:datePublished"1994"
schema:exampleOfWork<http://worldcat.org/entity/work/id/31704018>
schema:genre"Conference proceedings."@en
schema:genre"Conference proceedings"@en
schema:inLanguage"en"
schema:name"Advanced metallization for ULSI applications in 1993 : proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A."@en
schema:numberOfPages"611"
schema:publisher
schema:url
schema:workExample

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