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Advanced metallization for ULSI applications : proceedings of the conference held October 8-10, 1991, at AT & T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan

Author: Virendra Vir Singh Rana; Rajiv V Joshi; I Ohdomari; University of California, Berkeley. Continuing Education in Engineering.
Publisher: Pittsburgh : Materials Research Society., ©1992.
Series: Materials Research Society conference proceedings.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference proceedings
Congresses
Additional Physical Format: Online version:
Advanced metallization for ULSI applications.
Pittsburgh : Materials Research Society. c1992
(OCoLC)622857494
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Virendra Vir Singh Rana; Rajiv V Joshi; I Ohdomari; University of California, Berkeley. Continuing Education in Engineering.
ISBN: 1558991522 9781558991521
OCLC Number: 27011665
Notes: "Formerly Workshop on Tungsten and Other Advanced Metals for ULSI Applications."
Description: xv, 580 pages : illustrations ; 24 cm.
Series Title: Materials Research Society conference proceedings.
Responsibility: sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. ; editors, Virendra V.S. Rana, Rajiv V. Joshi, Iwao Ohdomari ; associate editors, Robert S. Blewer [and others].

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Primary Entity

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