skip to content
Advanced metallization for ULSI applications : proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan Preview this item
ClosePreview this item
Checking...

Advanced metallization for ULSI applications : proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan

Author: Virendra Vir Singh Rana; Rajiv V Joshi; I Ohdomari; University of California, Berkeley. Continuing Education in Engineering.; et al
Publisher: Pittsburgh : Materials Research Society. ©1992.
Series: Materials Research Society conference proceedings.
Edition/Format:   Book : Conference publication : EnglishView all editions and formats
Database:WorldCat
Rating:

(not yet rated) 0 with reviews - Be the first.

Subjects
More like this

 

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...

Details

Genre/Form: Conference proceedings
Congresses
Additional Physical Format: Online version:
Advanced metallization for ULSI applications.
Pittsburgh : Materials Research Society. c1992
(OCoLC)622857494
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Virendra Vir Singh Rana; Rajiv V Joshi; I Ohdomari; University of California, Berkeley. Continuing Education in Engineering.; et al
ISBN: 1558991522 9781558991521
OCLC Number: 27011665
Notes: "Formerly Workshop on Tungsten and Other Advanced Metals for ULSI Applications."
Description: xv, 580 p. : ill. ; 24 cm.
Series Title: Materials Research Society conference proceedings.
Responsibility: sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. ; editors, Virendra V.S. Rana, Rajiv V. Joshi, Iwao Ohdomari ; associate editors, Robert S. Blewer ... [et al.].

Reviews

User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data


<http://www.worldcat.org/oclc/27011665>
library:oclcnum"27011665"
library:placeOfPublication
library:placeOfPublication
owl:sameAs<info:oclcnum/27011665>
rdf:typeschema:Book
schema:about
schema:about
schema:about
schema:about
<http://id.worldcat.org/fast/975598>
rdf:typeschema:Intangible
schema:name"Electrochemical metallizing."@en
schema:name"Integrated circuits--Ultra large scale integration--Materials"@en
schema:about
schema:about
schema:about
schema:about
schema:about
schema:about
schema:about
<http://id.loc.gov/authorities/subjects/sh94000436>
rdf:typeschema:Intangible
schema:name"Integrated circuits--Ultra large scale integration--Materials"@en
schema:about
schema:about
<http://id.worldcat.org/fast/1158887>
rdf:typeschema:Intangible
schema:name"Integrated circuits--Ultra large scale integration--Materials."@en
schema:name"Tungsten"@en
schema:about
schema:contributor
schema:contributor
schema:contributor
<http://viaf.org/viaf/268119822>
rdf:typeschema:Organization
schema:name"University of California, Berkeley. Continuing Education in Engineering."
schema:contributor
schema:copyrightYear"1992"
schema:datePublished"1992"
schema:exampleOfWork<http://worldcat.org/entity/work/id/795699945>
schema:genre"Conference proceedings."@en
schema:genre"Conference proceedings"@en
schema:inLanguage"en"
schema:name"Advanced metallization for ULSI applications : proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan"@en
schema:numberOfPages"580"
schema:publisher
schema:url
schema:workExample

Content-negotiable representations

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.