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Genre/Form: Congresses
Additional Physical Format: Online version:
Advanced microelectronic processing techniques.
Bellingham, Wash., USA : SPIE, c2000
(OCoLC)606578357
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: H B Harrison; Andrew T S Wee; Subhash Gupta; Society of Photo-optical Instrumentation Engineers.; Nanyang Technological University.; Institute of Physics, Singapore.; et al
ISBN: 0819438995 9780819438997
OCLC Number: 46346568
Notes: Errata p. tipped in.
Description: xix, 212 p. : ill. ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 4227.
Responsibility: H. Barry Harrison, Andrew T.S. Wee, Subhash Gupta, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.].

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