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Alternative lithographic technologies III : 1-3 March 2011, San Jose, California, United States

Author: Daniel J C Herr; SPIE (Society)
Publisher: Bellingham, Wash. : SPIE, ©2011.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 7970.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Electronic books
Conference papers and proceedings
Congresses
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Daniel J C Herr; SPIE (Society)
OCLC Number: 725858937
Notes: Title from title screen (SPIE digital library, viewed May 19, 2011).
Description: 1 online resource : illustrations (some color).
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 7970.
Other Titles: Alternative lithographic technologies 3
Alternative lithographic technologies three
Responsibility: Daniel J.C. Herr, editor ; sponsored and published by SPIE.

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Primary Entity

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