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Analytic model of the ion angular distribution in a collisional sheath

Author: Vahid Vahedi; R A Stewart; M A Lieberman
Publisher: Berkeley : Electronics Research Laboratory, College of Engineering, University of California, [1992]
Series: Memorandum (University of California, Berkeley, Electronics Research Laboratory), no. UCB/ERL M92/114.
Edition/Format:   Print book : English
Database:WorldCat
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Document Type: Book
All Authors / Contributors: Vahid Vahedi; R A Stewart; M A Lieberman
OCLC Number: 44107707
Notes: "20 September 1992."
Description: 20 pages.
Series Title: Memorandum (University of California, Berkeley, Electronics Research Laboratory), no. UCB/ERL M92/114.
Responsibility: by V. Vahedi, R.A. Stewart, and M.A. Lieberman.

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