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ARPA/NBS Workshop V, moisture measurement technology for hermetic semiconductor devices : proceedings of the ARPA/NBS Workshop V, held at the National Bureau of Standards, Gaithersburg, MD, March 22-23, 1978

Author: Harry A Schafft; Stanley Ruthberg; Elaine C Cohen; United States. National Bureau of Standards.; United States. Advanced Research Projects Agency.
Publisher: Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. G.P.O., 1981.
Series: Semiconductor measurement technology.; NBS special publication, 400-69.
Edition/Format:   Print book : Conference publication : National government publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Government publication, National government publication
Document Type: Book
All Authors / Contributors: Harry A Schafft; Stanley Ruthberg; Elaine C Cohen; United States. National Bureau of Standards.; United States. Advanced Research Projects Agency.
OCLC Number: 7642380
Notes: "Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards."
"This activity was supported by Defense Advanced Research Projects Agency and National Bureau of Standards."
"Issued May 1981."
S/N 003-003-02326-4.
Description: v, 196 pages : illustrations ; 26 cm.
Series Title: Semiconductor measurement technology.; NBS special publication, 400-69.
Responsibility: edited by Harry A. Schafft, Stanley Ruthberg, and Elaine C. Cohen.

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Primary Entity

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