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|Material Type:||Conference publication, Government publication, National government publication|
|All Authors / Contributors:||
Harry A Schafft; Stanley Ruthberg; Elaine C Cohen; United States. National Bureau of Standards.; United States. Advanced Research Projects Agency.
|Notes:||"Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards."
"This activity was supported by Defense Advanced Research Projects Agency and National Bureau of Standards."
"Issued May 1981."
|Description:||v, 196 pages : illustrations ; 26 cm.|
|Series Title:||Semiconductor measurement technology.; NBS special publication, 400-69.|
|Responsibility:||edited by Harry A. Schafft, Stanley Ruthberg, and Elaine C. Cohen.|