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ASMC 2001 : the 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 23-24, International Conference Center, Munich Germany

Author: IEEE Electron Devices Society.; Semiconductor Equipment and Materials International.
Publisher: Piscataway, N.J. : IEEE ; San Jose, Calif. : SEMI, ©2001.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: IEEE Electron Devices Society.; Semiconductor Equipment and Materials International.
ISBN: 0780365550 9780780365551 0780365569 9780780365568
OCLC Number: 48083177
Notes: Cover title.
"IEEE Catalog Number 01CH37150"--Cover.
Description: [xi], 244 pages : illustrations ; 29 cm
Other Titles: Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI.
2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Advancing the science of semiconductor manufacturing excellence
Advanced Semiconductor Manufacturing Conference and Workshop
Responsibility: sponsored by [IEEE] Electron Devices Society [and others].

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