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ASMC 2002 : the 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 30-May 2, Seaport Hotel, Boston, MA, USA Preview this item
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ASMC 2002 : the 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 30-May 2, Seaport Hotel, Boston, MA, USA

Author: IEEE Electron Devices Society.; Semiconductor Equipment and Materials International.
Publisher: Piscataway, N.J. : IEEE ; San Jose, Calif. : SEMI, ©2002.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: IEEE Electron Devices Society.; Semiconductor Equipment and Materials International.
OCLC Number: 52847429
Notes: Cover title.
"IEEE Catalog Number: 02CH37259"--Cover.
Description: 1 online resource ([ix], 430 pages) : illustrations
Other Titles: Advanced Semiconductor Manufacturing 2002 IEEE/SEMI Conference and Workshop.
2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Advancing the science of semiconductor manufacturing excellence
Advanced Semiconductor Manufacturing Conference and Workshop
Responsibility: sponsored by [IEEE] Electron Devices Society [and others].

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