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Ätzverfahren für die Mikrotechnik

Author: Michael Köhler
Publisher: Weinheim : Wiley-VCH, 1998.
Edition/Format:   Print book : GermanView all editions and formats
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Document Type: Book
All Authors / Contributors: Michael Köhler
ISBN: 3527288694 9783527288694
OCLC Number: 245631184
Notes: Engl. Ausg. u.d.T.: Köhler, Michael: Etching in microsystem technology.
Description: XVI, 398 Seiten : Illustrationen, Diagramme
Other Titles: Etching in microsystem technology
Responsibility: Michael Köhler.

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