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Auger electron spectroscopy, secondary ion mass spectrometry and optical characterization of a-C:H and BN films

Author: John J Pouch; Samuel A Alterovitz; Joseph D Warner; Lewis Research Center.
Publisher: [Cleveland, Ohio] : [National Aeronautics and Space Administration, Lewis Research Center], [1986]
Series: NASA technical memorandum, 87258.
Edition/Format:   Book   Microform : National government publication : Microfiche : English
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Material Type: Government publication, National government publication
Document Type: Book
All Authors / Contributors: John J Pouch; Samuel A Alterovitz; Joseph D Warner; Lewis Research Center.
OCLC Number: 162511576
Reproduction Notes: Microfiche. [Washington, D.C. : National Aeronautics and Space Administration], 1986. 1 microfiche.
Description: 1 volume.
Series Title: NASA technical memorandum, 87258.
Responsibility: John J. Pouch, Samuel A. Alterovitz, and Joseph D. Warner.

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