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Borophosphosilicate glass thin films in electronics

Author: V I︠U︡ Vasilʹev
Publisher: Hauppauge, New York, NY : Nova Science Publishers, Inc., [2013] ©2013
Series: Electronics and telecommunications research; Materials science and technologies series.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoĭ mikroėlektroniki. English.
Borophosphosilicate glass thin films in electronics.
Hauppauge, New York : Nova Science Publishers, Inc., [2013]
(DLC) 2013002527
(OCoLC)840937559
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: V I︠U︡ Vasilʹev
ISBN: 9781626180345 1626180342
OCLC Number: 854583694
Language Note: Text in English.
Notes: Translation of: Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoĭ mikroėlektroniki.
Description: 1 online resource (263 pages).
Series Title: Electronics and telecommunications research; Materials science and technologies series.
Other Titles: Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoĭ mikroėlektroniki.
Responsibility: editor, Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering, Electronics, and Physics Faculty, Novosibirsk State Technical University, Novosibirsk, Russia).

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