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Bringing scanning probe microscopy up to speed

Author: S C Minne; S R Manalis; Calvin F Quate
Publisher: Boston : Kluwer, ©1999.
Series: Microsystems (Series), v. 3.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:
"Bringing Scanning Probe Microscopy up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold.
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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: S C Minne; S R Manalis; Calvin F Quate
ISBN: 0792384660 9780792384663
OCLC Number: 40644852
Description: 173 pages : illustrations ; 25 cm.
Contents: Ch. 1. Improving Conventional Scanning Probe Microscopes --
Ch. 2. Design of Piezoresistive Cantilevers with Integrated Actuators --
Ch. 3. Increasing the Speed of Imaging --
Ch. 4. Cantilevers with Interdigital Deflection Sensors --
Ch. 5. Operation of the Interdigital Cantilever --
Ch. 6. Cantilever Arrays --
Ch. 7. Scanning Probes for Information Storage and Retrieval --
Ch. 8. Silicon Process Flow: ZnO actuator and piezoresistive sensor --
Ch. 9. Silicon Process Flow: Interdigital Cantilever.
Series Title: Microsystems (Series), v. 3.
Responsibility: by S.C. Minne, S.R. Manalis, C.F. Quate.
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Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. First, fast scanning systems for  Read more...

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`The presentation is clear and easy to follow, written by hands-on persons. There is a wealth of technical detail and useful diagrams. ...for persons who are serious fabricators of SPM...it is Read more...

 
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