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CCD image sensors in deep-ultraviolet : degradation behavior and damage mechanisms

Author: Flora M Li; Arokia Nathan
Publisher: Berlin : Springer, 2005.
Series: Microtechnology and MEMS.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. This book describes the degradation mechanisms and  Read more...

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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Flora M Li; Arokia Nathan
ISBN: 354022680X 9783540226802
OCLC Number: 254247763
Notes: Literaturverz. S. 223 - 227.
Description: XI, 231 Seiten : Diagramme ; 24 cm.
Contents: Overview of CCD.- CCD Imaging in the Ultraviolet (UV) Regime.- Silicon.- Silicon Dioxide.- Si-SiO2 Interface.- General Effects of Radiation.- Effects of Radiation on CCDs.- UV-Induced Effects in Si.- UV Laser Induced Effects in SiO2.- UV Laser Induced Effects at the Si-SiO2 Interface.- CCD Measurements at 157nm.- Design Optimizations for Future Research.- Concluding Remarks.
Series Title: Microtechnology and MEMS.
Responsibility: F.M. Li ; A. Nathan.
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Primary Entity

<http://www.worldcat.org/oclc/254247763> # CCD image sensors in deep-ultraviolet : degradation behavior and damage mechanisms
    a schema:CreativeWork, schema:Book ;
   library:oclcnum "254247763" ;
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/gw> ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/193915117#Place/berlin> ; # Berlin
   schema:about <http://experiment.worldcat.org/entity/work/data/193915117#Topic/siliciumdioxid> ; # Siliciumdioxid
   schema:about <http://id.worldcat.org/fast/1094469> ; # Remote sensing
   schema:about <http://experiment.worldcat.org/entity/work/data/193915117#Topic/degradation> ; # Degradation
   schema:about <http://id.worldcat.org/fast/967508> ; # Image processing--Digital techniques
   schema:about <http://id.worldcat.org/fast/852340> ; # Charge coupled devices
   schema:about <http://experiment.worldcat.org/entity/work/data/193915117#Topic/tiefes_ultraviolett> ; # Tiefes Ultraviolett
   schema:about <http://dewey.info/class/621.364/> ;
   schema:about <http://id.loc.gov/authorities/subjects/sh85064447> ; # Image processing--Digital techniques
   schema:about <http://experiment.worldcat.org/entity/work/data/193915117#Topic/strahlenschaden> ; # Strahlenschaden
   schema:about <http://id.worldcat.org/fast/1113491> ; # Service life (Engineering)
   schema:about <http://experiment.worldcat.org/entity/work/data/193915117#Topic/ccd_sensor> ; # CCD-Sensor
   schema:about <http://experiment.worldcat.org/entity/work/data/193915117#Topic/excimerlaser> ; # Excimerlaser
   schema:bookFormat bgn:PrintBook ;
   schema:contributor <http://viaf.org/viaf/6024987> ; # Arokia Nathan
   schema:creator <http://viaf.org/viaf/65099585> ; # Flora M. Li
   schema:datePublished "2005" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/193915117> ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/193915117#Series/microtechnology_and_mems> ; # Microtechnology and MEMS.
   schema:isSimilarTo <http://worldcat.org/entity/work/data/193915117#CreativeWork/> ;
   schema:name "CCD image sensors in deep-ultraviolet : degradation behavior and damage mechanisms" ;
   schema:productID "254247763" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/254247763#PublicationEvent/berlin_springer_2005> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/193915117#Agent/springer> ; # Springer
   schema:url <http://catdir.loc.gov/catdir/enhancements/fy0813/2004116223-b.html> ;
   schema:url <http://dx.doi.org/10.1007/b139047> ;
   schema:url <http://catdir.loc.gov/catdir/enhancements/fy0663/2004116223-d.html> ;
   schema:url <http://catdir.loc.gov/catdir/enhancements/fy0813/2004116223-t.html> ;
   schema:workExample <http://worldcat.org/isbn/9783540226802> ;
   umbel:isLike <http://d-nb.info/973648279> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/254247763> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/193915117#Series/microtechnology_and_mems> # Microtechnology and MEMS.
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/254247763> ; # CCD image sensors in deep-ultraviolet : degradation behavior and damage mechanisms
   schema:name "Microtechnology and MEMS." ;
   schema:name "Microtechnology and MEMS" ;
    .

<http://experiment.worldcat.org/entity/work/data/193915117#Topic/tiefes_ultraviolett> # Tiefes Ultraviolett
    a schema:Intangible ;
   schema:name "Tiefes Ultraviolett" ;
    .

<http://id.loc.gov/authorities/subjects/sh85064447> # Image processing--Digital techniques
    a schema:Intangible ;
   schema:name "Image processing--Digital techniques" ;
    .

<http://id.worldcat.org/fast/1094469> # Remote sensing
    a schema:Intangible ;
   schema:name "Remote sensing" ;
    .

<http://id.worldcat.org/fast/1113491> # Service life (Engineering)
    a schema:Intangible ;
   schema:name "Service life (Engineering)" ;
    .

<http://id.worldcat.org/fast/852340> # Charge coupled devices
    a schema:Intangible ;
   schema:name "Charge coupled devices" ;
    .

<http://id.worldcat.org/fast/967508> # Image processing--Digital techniques
    a schema:Intangible ;
   schema:name "Image processing--Digital techniques" ;
    .

<http://viaf.org/viaf/6024987> # Arokia Nathan
    a schema:Person ;
   schema:familyName "Nathan" ;
   schema:givenName "Arokia" ;
   schema:name "Arokia Nathan" ;
    .

<http://viaf.org/viaf/65099585> # Flora M. Li
    a schema:Person ;
   schema:familyName "Li" ;
   schema:givenName "Flora M." ;
   schema:name "Flora M. Li" ;
    .

<http://worldcat.org/entity/work/data/193915117#CreativeWork/>
    a schema:CreativeWork ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/254247763> ; # CCD image sensors in deep-ultraviolet : degradation behavior and damage mechanisms
    .

<http://worldcat.org/isbn/9783540226802>
    a schema:ProductModel ;
   schema:isbn "354022680X" ;
   schema:isbn "9783540226802" ;
    .

<http://www.worldcat.org/title/-/oclc/254247763>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
   schema:about <http://www.worldcat.org/oclc/254247763> ; # CCD image sensors in deep-ultraviolet : degradation behavior and damage mechanisms
   schema:dateModified "2017-12-23" ;
   void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .


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