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Ceramic thick films for MEMs and microdevices

Author: Robert Dorey
Publisher: Amserdam : Wilson Andrew, 2012.
Series: Micro & nano technologies.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:

The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. This book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems  Read more...

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Genre/Form: Electronic books
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Robert Dorey
ISBN: 9781437778182 1437778186 1437778178 9781437778175
OCLC Number: 769188148
Description: 1 online resource (xviii, 191 pages).
Contents: Integration and applications Routes to thick films Thick film deposition techniques Microstructure-property relationships Pattering and structuring Houston, we have a problem: Thick film troubleshooting Recipes and techniques
Series Title: Micro & nano technologies.
Responsibility: Robert Dorey.

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