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Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA

Author: David BurnettShinʼichiro KimuraBhanwar SinghSociety of Photo-optical Instrumentation Engineers.Solid State Technology (Organization)All authors
Publisher: Bellingham, Wash., USA : SPIE, ©2000.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 4181.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: (DLC) 2002275088
(OCoLC)45483032
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: David Burnett; Shinʼichiro Kimura; Bhanwar Singh; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization); Electrochemical Society.; American Vacuum Society.; SPIE Digital Library.
ISBN: 0819438421 9780819438423
OCLC Number: 53834817
Reproduction Notes: Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
Description: ix, 344 pages : illustrations ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 4181.
Responsibility: David Burnett, Shinʼichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA).

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Primary Entity

<http://www.worldcat.org/oclc/53834817> # Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
    a schema:Book, schema:MediaObject, schema:CreativeWork ;
   library:oclcnum "53834817" ;
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/wau> ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/194732219#Place/bellingham_wash_usa> ; # Bellingham, Wash., USA
   schema:about <http://experiment.worldcat.org/entity/work/data/194732219#Topic/semiconductors> ; # Semiconductors
   schema:about <http://id.worldcat.org/fast/1112198> ; # Semiconductors
   schema:about <http://dewey.info/class/621.381531/e21/> ;
   schema:about <http://experiment.worldcat.org/entity/work/data/194732219#Topic/microlithography> ; # Microlithography
   schema:about <http://id.worldcat.org/fast/1019757> ; # Microelectronics
   schema:about <http://id.worldcat.org/fast/1046760> ; # Optical interconnects
   schema:about <http://experiment.worldcat.org/entity/work/data/194732219#Topic/integrated_optics> ; # Integrated optics
   schema:about <http://id.worldcat.org/fast/1019883> ; # Microlithography
   schema:about <http://experiment.worldcat.org/entity/work/data/194732219#Topic/microelectronics> ; # Microelectronics
   schema:about <http://id.worldcat.org/fast/975646> ; # Integrated optics
   schema:about <http://experiment.worldcat.org/entity/work/data/194732219#Topic/optical_interconnects> ; # Optical interconnects
   schema:bookFormat schema:EBook ;
   schema:contributor <http://viaf.org/viaf/145335166> ; # Electrochemical Society.
   schema:contributor <http://experiment.worldcat.org/entity/work/data/194732219#Person/burnett_david> ; # David Burnett
   schema:contributor <http://viaf.org/viaf/151856603> ; # Society of Photo-optical Instrumentation Engineers.
   schema:contributor <http://viaf.org/viaf/11677502> ; # Bhanwar Singh
   schema:contributor <http://viaf.org/viaf/19328950> ; # Shinʼichiro Kimura
   schema:contributor <http://viaf.org/viaf/227145858146823022512> ; # Solid State Technology (Organization)
   schema:contributor <http://experiment.worldcat.org/entity/work/data/194732219#Organization/spie_digital_library> ; # SPIE Digital Library.
   schema:contributor <http://viaf.org/viaf/137686433> ; # American Vacuum Society.
   schema:copyrightYear "2000" ;
   schema:datePublished "2000" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/194732219> ;
   schema:genre "Conference publication"@en ;
   schema:genre "Conference papers and proceedings"@en ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/194732219#Series/spie_proceedings_series> ; # SPIE proceedings series ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/194732219#Series/proceedings_of_spie_the_international_society_for_optical_engineering> ; # Proceedings of SPIE--the International Society for Optical Engineering ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/45483032> ;
   schema:name "Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA"@en ;
   schema:productID "53834817" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/53834817#PublicationEvent/bellingham_wash_usa_spie_2000> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/194732219#Agent/spie> ; # SPIE
   schema:url <http://link.spie.org/PSISDG/4181/1> ;
   schema:url <http://proceedings.spiedigitallibrary.org/volume.aspx?volume=4181> ;
   schema:workExample <http://worldcat.org/isbn/9780819438423> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/53834817> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/194732219#Person/burnett_david> # David Burnett
    a schema:Person ;
   schema:familyName "Burnett" ;
   schema:givenName "David" ;
   schema:name "David Burnett" ;
    .

<http://experiment.worldcat.org/entity/work/data/194732219#Place/bellingham_wash_usa> # Bellingham, Wash., USA
    a schema:Place ;
   schema:name "Bellingham, Wash., USA" ;
    .

<http://experiment.worldcat.org/entity/work/data/194732219#Series/proceedings_of_spie_the_international_society_for_optical_engineering> # Proceedings of SPIE--the International Society for Optical Engineering ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/53834817> ; # Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
   schema:name "Proceedings of SPIE--the International Society for Optical Engineering ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/194732219#Series/spie_proceedings_series> # SPIE proceedings series ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/53834817> ; # Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
   schema:name "SPIE proceedings series ;" ;
    .

<http://id.worldcat.org/fast/1019757> # Microelectronics
    a schema:Intangible ;
   schema:name "Microelectronics"@en ;
    .

<http://id.worldcat.org/fast/1019883> # Microlithography
    a schema:Intangible ;
   schema:name "Microlithography"@en ;
    .

<http://id.worldcat.org/fast/1046760> # Optical interconnects
    a schema:Intangible ;
   schema:name "Optical interconnects"@en ;
    .

<http://id.worldcat.org/fast/1112198> # Semiconductors
    a schema:Intangible ;
   schema:name "Semiconductors"@en ;
    .

<http://id.worldcat.org/fast/975646> # Integrated optics
    a schema:Intangible ;
   schema:name "Integrated optics"@en ;
    .

<http://viaf.org/viaf/11677502> # Bhanwar Singh
    a schema:Person ;
   schema:familyName "Singh" ;
   schema:givenName "Bhanwar" ;
   schema:name "Bhanwar Singh" ;
    .

<http://viaf.org/viaf/137686433> # American Vacuum Society.
    a schema:Organization ;
   schema:name "American Vacuum Society." ;
    .

<http://viaf.org/viaf/145335166> # Electrochemical Society.
    a schema:Organization ;
   schema:name "Electrochemical Society." ;
    .

<http://viaf.org/viaf/151856603> # Society of Photo-optical Instrumentation Engineers.
    a schema:Organization ;
   schema:name "Society of Photo-optical Instrumentation Engineers." ;
    .

<http://viaf.org/viaf/19328950> # Shinʼichiro Kimura
    a schema:Person ;
   schema:familyName "Kimura" ;
   schema:givenName "Shinʼichiro" ;
   schema:name "Shinʼichiro Kimura" ;
    .

<http://viaf.org/viaf/227145858146823022512> # Solid State Technology (Organization)
    a schema:Organization ;
   schema:name "Solid State Technology (Organization)" ;
    .

<http://worldcat.org/isbn/9780819438423>
    a schema:ProductModel ;
   schema:isbn "0819438421" ;
   schema:isbn "9780819438423" ;
    .

<http://www.worldcat.org/oclc/45483032>
    a schema:CreativeWork ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/53834817> ; # Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
    .

<http://www.worldcat.org/title/-/oclc/53834817>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
   schema:about <http://www.worldcat.org/oclc/53834817> ; # Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
   schema:dateModified "2017-12-25" ;
   void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .


Content-negotiable representations

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