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Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland, March 1998

Author: David G Seiler
Publisher: Woodbury, NY : American Institute of Physics, ©1998.
Series: AIP conference proceedings, no. 449.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Congresses Software
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: David G Seiler
ISBN: 1563967537 9781563967535 1563968681 9781563968686
OCLC Number: 468761697
Notes: "The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998"--Preface.
Accompanying computer disc contains full text from the book.
Description: xv, 960 pages : illustrations ; 28 cm + 1 computer optical disc.
Details: System requirements for accompanying computer disc: IBM PC or compatible; hard disk with at least 4 MB free; at least 4 MB RAM; Windows 95 or Windows 3.1.; Acrobat Reader.; System requirements for Macintosh computer disk: Macintosh, Power Mac, or compatible; hard disk with 4 MB free; 2 MB RAM; System 7 or later; Acrobat Reader.; System requirements for Unix computer disk: SUN Sparcstation; hard disk with 8 MB free; 32 MB RAM; SunOS version 4.1.3 or later, Solaris 2.3, 2.4. or 2.4 or later; Acrobat Reader.
Series Title: AIP conference proceedings, no. 449.
Responsibility: editors, David G. Seiler [and others].

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