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Characterization in silicon processing

Author: Yale Strausser; C Richard Brundle; Charles A Evans
Publisher: New York, NY : Momentum Press, 2010.
Series: Materials characterization series.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Database:WorldCat
Summary:
With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the Materials Characterization series focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Characterization in silicon processing.
New York : Momentum Press, 2010
(OCoLC)607193462
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Yale Strausser; C Richard Brundle; Charles A Evans
ISBN: 9781606501115 1606501119 9781606501092 1606501097
OCLC Number: 752976145
Notes: "First published by Butterworth-Heinemann in 1995 ... Reissued volume published in 2010 by Momentum Press."--Title page verso.
Description: 1 online resource (xv, 240 pages) : illustrations.
Contents: Application of materials characterization techniques to silicon epitaxial growth / C.I. Drowley --
Polysilicon conductors / Yale Strausser --
Silicides / S.P. Murarka --
Aluminum- and copper-based conductors / David Fanger and Roger Tonneman --
Tungsten-based conductors / Roc Blumenthal and Gregory C. Smith --
Barrier films / M. Lawrence A. Dass.
Series Title: Materials characterization series.
Other Titles: Silicon processing
Responsibility: editor, Yale Strausser ; series editors, C. Richard Brundle and Charles A. Evans.
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Abstract:

With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume focuses on the process flow of silicon wafer manufacture where materials properties,  Read more...

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Primary Entity

<http://www.worldcat.org/oclc/752976145> # Characterization in silicon processing
    a schema:MediaObject, schema:CreativeWork, schema:Book ;
    library:oclcnum "752976145" ;
    library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/1106191097#Place/new_york_ny> ; # New York, NY
    library:placeOfPublication <http://id.loc.gov/vocabulary/countries/nyu> ;
    schema:about <http://id.worldcat.org/fast/1112128> ; # Semiconductor films
    schema:about <http://dewey.info/class/620.193/> ;
    schema:about <http://id.worldcat.org/fast/1118631> ; # Silicon
    schema:about <http://experiment.worldcat.org/entity/work/data/1106191097#Topic/engineering> ; # Engineering
    schema:about <http://experiment.worldcat.org/entity/work/data/1106191097#Topic/technology_&_engineering_material_science> ; # TECHNOLOGY & ENGINEERING--Material Science
    schema:about <http://id.worldcat.org/fast/904587> ; # Electric conductors
    schema:about <http://id.worldcat.org/fast/1139210> ; # Surface chemistry
    schema:alternateName "Silicon processing" ;
    schema:bookFormat schema:EBook ;
    schema:contributor <http://experiment.worldcat.org/entity/work/data/1106191097#Person/evans_charles_a> ; # Charles A. Evans
    schema:contributor <http://viaf.org/viaf/58288759> ; # Yale Strausser
    schema:contributor <http://viaf.org/viaf/9930886> ; # C Richard Brundle
    schema:datePublished "2010" ;
    schema:description "Application of materials characterization techniques to silicon epitaxial growth / C.I. Drowley -- Polysilicon conductors / Yale Strausser -- Silicides / S.P. Murarka -- Aluminum- and copper-based conductors / David Fanger and Roger Tonneman -- Tungsten-based conductors / Roc Blumenthal and Gregory C. Smith -- Barrier films / M. Lawrence A. Dass."@en ;
    schema:description "With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the Materials Characterization series focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the typical processes involved for each such material, including deposition, thermal treatment, and lithography. Readers will find features such as: -- The essential processes of Silic."@en ;
    schema:exampleOfWork <http://worldcat.org/entity/work/id/1106191097> ;
    schema:genre "Electronic books"@en ;
    schema:inLanguage "en" ;
    schema:isPartOf <http://experiment.worldcat.org/entity/work/data/1106191097#Series/materials_characterization_series> ; # Materials characterization series.
    schema:isSimilarTo <http://www.worldcat.org/oclc/607193462> ;
    schema:name "Characterization in silicon processing"@en ;
    schema:productID "752976145" ;
    schema:publication <http://www.worldcat.org/title/-/oclc/752976145#PublicationEvent/new_york_ny_momentum_press_2010> ;
    schema:publisher <http://experiment.worldcat.org/entity/work/data/1106191097#Agent/momentum_press> ; # Momentum Press
    schema:url <http://www.myilibrary.com?id=420814> ;
    schema:url <http://proquest.safaribooksonline.com/?fpi=9781606501092> ;
    schema:url <http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=501143> ;
    schema:url <http://proquest.tech.safaribooksonline.de/9781606501092> ;
    schema:url <http://public.eblib.com/choice/publicfullrecord.aspx?p=883367> ;
    schema:url <http://site.ebrary.com/id/10395178> ;
    schema:url <http://proquest.safaribooksonline.com/9781606501092> ;
    schema:workExample <http://worldcat.org/isbn/9781606501092> ;
    schema:workExample <http://worldcat.org/isbn/9781606501115> ;
    wdrs:describedby <http://www.worldcat.org/title/-/oclc/752976145> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/1106191097#Agent/momentum_press> # Momentum Press
    a bgn:Agent ;
    schema:name "Momentum Press" ;
    .

<http://experiment.worldcat.org/entity/work/data/1106191097#Person/evans_charles_a> # Charles A. Evans
    a schema:Person ;
    schema:familyName "Evans" ;
    schema:givenName "Charles A." ;
    schema:name "Charles A. Evans" ;
    .

<http://experiment.worldcat.org/entity/work/data/1106191097#Series/materials_characterization_series> # Materials characterization series.
    a bgn:PublicationSeries ;
    schema:hasPart <http://www.worldcat.org/oclc/752976145> ; # Characterization in silicon processing
    schema:name "Materials characterization series." ;
    schema:name "Materials characterization series" ;
    .

<http://experiment.worldcat.org/entity/work/data/1106191097#Topic/technology_&_engineering_material_science> # TECHNOLOGY & ENGINEERING--Material Science
    a schema:Intangible ;
    schema:name "TECHNOLOGY & ENGINEERING--Material Science"@en ;
    .

<http://id.worldcat.org/fast/1112128> # Semiconductor films
    a schema:Intangible ;
    schema:name "Semiconductor films"@en ;
    .

<http://id.worldcat.org/fast/1118631> # Silicon
    a schema:Intangible ;
    schema:name "Silicon"@en ;
    .

<http://id.worldcat.org/fast/1139210> # Surface chemistry
    a schema:Intangible ;
    schema:name "Surface chemistry"@en ;
    .

<http://id.worldcat.org/fast/904587> # Electric conductors
    a schema:Intangible ;
    schema:name "Electric conductors"@en ;
    .

<http://viaf.org/viaf/58288759> # Yale Strausser
    a schema:Person ;
    schema:familyName "Strausser" ;
    schema:givenName "Yale" ;
    schema:name "Yale Strausser" ;
    .

<http://viaf.org/viaf/9930886> # C Richard Brundle
    a schema:Person ;
    schema:familyName "Brundle" ;
    schema:givenName "C. Richard" ;
    schema:name "C Richard Brundle" ;
    .

<http://worldcat.org/isbn/9781606501092>
    a schema:ProductModel ;
    schema:isbn "1606501097" ;
    schema:isbn "9781606501092" ;
    .

<http://worldcat.org/isbn/9781606501115>
    a schema:ProductModel ;
    schema:isbn "1606501119" ;
    schema:isbn "9781606501115" ;
    .

<http://www.worldcat.org/oclc/607193462>
    a schema:CreativeWork ;
    rdfs:label "Characterization in silicon processing." ;
    schema:description "Print version:" ;
    schema:isSimilarTo <http://www.worldcat.org/oclc/752976145> ; # Characterization in silicon processing
    .


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