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Characterization of silicon surfaces by the electron energy loss spectrum.

Author: P S P Wei; BOEING SCIENTIFIC RESEARCH LABS SEATTLE WASH.
Publisher: Ft. Belvoir Defense Technical Information Center JUN 1970.
Edition/Format:   Print book : English
Summary:
The energy loss spectra of silicon during several stages of the cleaning treatment have been studied in a LEED apparatus. A layer of beta-SiC formed on the silicon surface is detected. The results suggest that the energy loss spectrum is sensitive to the change in chemical composition and electronic structure of the solid surface. (Author).
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Document Type: Book
All Authors / Contributors: P S P Wei; BOEING SCIENTIFIC RESEARCH LABS SEATTLE WASH.
OCLC Number: 227596292
Description: 9 pages

Abstract:

The energy loss spectra of silicon during several stages of the cleaning treatment have been studied in a LEED apparatus. A layer of beta-SiC formed on the silicon surface is detected. The results suggest that the energy loss spectrum is sensitive to the change in chemical composition and electronic structure of the solid surface. (Author).

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