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Characterization of the processing plasma in an engineering prototype reactor for plasma immersion ion implantation

Author: R A Stewart; et al
Publisher: Berkeley : Electronics Research Laboratory, College of Engineering, University of California, [1990]
Series: Memorandum (University of California, Berkeley, Electronics Research Laboratory), no. UCB/ERL M90/100.
Edition/Format:   Book : English
Database:WorldCat
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Document Type: Book
All Authors / Contributors: R A Stewart; et al
OCLC Number: 44005921
Notes: "12 November 1990."
Description: 12 p., 18 p. of plates
Series Title: Memorandum (University of California, Berkeley, Electronics Research Laboratory), no. UCB/ERL M90/100.
Responsibility: by R.A. Stewart ... [et al.].

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