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Charged particle optics III : 27-28 July 1997, San Diego, California

Author: Eric Munro; Society of Photo-optical Instrumentation Engineers.
Publisher: Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1997.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 3155.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Eric Munro; Society of Photo-optical Instrumentation Engineers.
ISBN: 081942577X 9780819425775
OCLC Number: 37826273
Description: vii, 266 pages : illustrations ; 28 cm.
Contents: Electron guns and space charge --
Electron lenses and deflectors : analysis and design --
Numerical simulation and design techniques --
Electron and ion lithography, e-beam testing, and electron microscopes --
Accelerators, curved axis systems, and multipole lenses --
Aberration analysis and correction.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 3155.
Other Titles: Charged particle optics 3
Charged particle optics three
Responsibility: Eric Munro, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.

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Primary Entity

<http://www.worldcat.org/oclc/37826273> # Charged particle optics III : 27-28 July 1997, San Diego, California
    a schema:CreativeWork, schema:Book ;
   library:oclcnum "37826273" ;
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/wau> ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/56222384#Place/bellingham_wash> ; # Bellingham, Wash.
   schema:about <http://dewey.info/class/621.36/e21/> ;
   schema:about <http://id.worldcat.org/fast/906693> ; # Electron optics
   schema:about <http://experiment.worldcat.org/entity/work/data/56222384#Topic/electron_optics_industrial_applications> ; # Electron optics--Industrial applications
   schema:about <http://id.worldcat.org/fast/906696> ; # Electron optics--Industrial applications
   schema:alternateName "Charged particle optics three" ;
   schema:alternateName "Charged particle optics 3" ;
   schema:bookFormat bgn:PrintBook ;
   schema:contributor <http://viaf.org/viaf/279742023> ; # Eric Munro
   schema:contributor <http://viaf.org/viaf/151856603> ; # Society of Photo-optical Instrumentation Engineers.
   schema:copyrightYear "1997" ;
   schema:datePublished "1997" ;
   schema:description "Electron guns and space charge -- Electron lenses and deflectors : analysis and design -- Numerical simulation and design techniques -- Electron and ion lithography, e-beam testing, and electron microscopes -- Accelerators, curved axis systems, and multipole lenses -- Aberration analysis and correction."@en ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/56222384> ;
   schema:genre "Conference publication"@en ;
   schema:genre "Conference papers and proceedings"@en ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/56222384#Series/proceedings_of_spie_the_international_society_for_optical_engineering> ; # Proceedings of SPIE--the International Society for Optical Engineering ;
   schema:isPartOf <http://worldcat.org/issn/0277-786X> ; # SPIE proceedings series,
   schema:name "Charged particle optics III : 27-28 July 1997, San Diego, California"@en ;
   schema:productID "37826273" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/37826273#PublicationEvent/bellingham_wash_society_of_photo_optical_instrumentation_engineers_1997> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/56222384#Agent/society_of_photo_optical_instrumentation_engineers> ; # Society of Photo-optical Instrumentation Engineers
   schema:workExample <http://worldcat.org/isbn/9780819425775> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/37826273> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/56222384#Agent/society_of_photo_optical_instrumentation_engineers> # Society of Photo-optical Instrumentation Engineers
    a bgn:Agent ;
   schema:name "Society of Photo-optical Instrumentation Engineers" ;
    .

<http://experiment.worldcat.org/entity/work/data/56222384#Place/bellingham_wash> # Bellingham, Wash.
    a schema:Place ;
   schema:name "Bellingham, Wash." ;
    .

<http://experiment.worldcat.org/entity/work/data/56222384#Series/proceedings_of_spie_the_international_society_for_optical_engineering> # Proceedings of SPIE--the International Society for Optical Engineering ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/37826273> ; # Charged particle optics III : 27-28 July 1997, San Diego, California
   schema:name "Proceedings of SPIE--the International Society for Optical Engineering ;" ;
    .

<http://id.worldcat.org/fast/906693> # Electron optics
    a schema:Intangible ;
   schema:name "Electron optics"@en ;
    .

<http://id.worldcat.org/fast/906696> # Electron optics--Industrial applications
    a schema:Intangible ;
   schema:name "Electron optics--Industrial applications"@en ;
    .

<http://viaf.org/viaf/151856603> # Society of Photo-optical Instrumentation Engineers.
    a schema:Organization ;
   schema:name "Society of Photo-optical Instrumentation Engineers." ;
    .

<http://viaf.org/viaf/279742023> # Eric Munro
    a schema:Person ;
   schema:familyName "Munro" ;
   schema:givenName "Eric" ;
   schema:name "Eric Munro" ;
    .

<http://worldcat.org/isbn/9780819425775>
    a schema:ProductModel ;
   schema:isbn "081942577X" ;
   schema:isbn "9780819425775" ;
    .

<http://worldcat.org/issn/0277-786X> # SPIE proceedings series,
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/37826273> ; # Charged particle optics III : 27-28 July 1997, San Diego, California
   schema:issn "0277-786X" ;
   schema:name "SPIE proceedings series," ;
    .


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