skip to content
Chemical vapor deposited materials Preview this item
ClosePreview this item

Chemical vapor deposited materials

Author: Francis S Galasso
Publisher: Boca Raton : CRC Press, ©1991.
Edition/Format:   Print book : EnglishView all editions and formats

Intended for researchers and scientists involved in the preparation of CVD materials, this book presents a concise description of the preparation, structure, and properties of some of the most  Read more...


(not yet rated) 0 with reviews - Be the first.

More like this


Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...


Document Type: Book
All Authors / Contributors: Francis S Galasso
ISBN: 0849342198 9780849342196
OCLC Number: 23870335
Description: 144 pages : illustrations ; 24 cm
Contents: INTRODUCTION. Equipment. Growth Process. Chemical Equilibrium. Coating Thickness. Applications. CVD Si3N4. Preparation. Structure. Properties. Oxidation. Applications. CVD SiC. Preparation. Structure. Properties. Oxidation. Applications. CVD BN. Preparation. Structure. Properties. Oxidation. Applications. OTHER CVD MATERIALS. CVD Materials. Aluminum. Aluminum Nitride. Aluminium Oxide. Boron. Boron Carbide. Carbon. Cobalt. Hafnium. Hafnium Carbide. Hafnium Nitride. Iron. Molybdenum. Molybdenum Boride. Molybdenum Carbide. Molybdenum Silicide. Nickel. Niobium. Niobium Carbide. Rhenium. Tantalum. Tantalum Boride. Tantalum Carbide. Tantalum Nitride. Titanium. Titanium Boride. Titanium Carbide. Titanium Nitride. Titanium Silicide. Tungsten. Tungsten Boride. Tungsten Carbide. Tungsten Silicide. Zirconium. Zirconium Boride. Zirconium Nitride. Zirconium Oxide. Index.
Responsibility: author, Francis S. Galasso.
More information:


User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...


Be the first.

Similar Items

Related Subjects:(2)

Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data

Primary Entity

<> # Chemical vapor deposited materials
    a schema:Book, schema:CreativeWork ;
   library:oclcnum "23870335" ;
   library:placeOfPublication <> ; # Boca Raton
   library:placeOfPublication <> ;
   schema:about <> ; # Materials
   schema:about <> ; # Vapor-plating
   schema:about <> ;
   schema:bookFormat bgn:PrintBook ;
   schema:copyrightYear "1991" ;
   schema:creator <> ; # Francis S. Galasso
   schema:datePublished "1991" ;
   schema:exampleOfWork <> ;
   schema:inLanguage "en" ;
   schema:name "Chemical vapor deposited materials"@en ;
   schema:productID "23870335" ;
   schema:publication <> ;
   schema:publisher <> ; # CRC Press
   schema:workExample <> ;
   wdrs:describedby <> ;

Related Entities

<> # Materials
    a schema:Intangible ;
   schema:name "Materials"@en ;

<> # Vapor-plating
    a schema:Intangible ;
   schema:name "Vapor-plating"@en ;

<> # Francis S. Galasso
    a schema:Person ;
   schema:familyName "Galasso" ;
   schema:givenName "Francis S." ;
   schema:name "Francis S. Galasso" ;

    a schema:ProductModel ;
   schema:isbn "0849342198" ;
   schema:isbn "9780849342196" ;

Content-negotiable representations

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.