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Chemical vapor deposition : CVD.

Publisher: Weinheim : Wiley-VCH, 1998.
Edition/Format:   Journal, magazine : German
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Material Type: Internet resource
Document Type: Journal / Magazine / Newspaper, Internet Resource
ISSN:1521-3862
OCLC Number: 76516938
Notes: Vol. 4, Issue 1 (Januar 1998)-
Erscheint zweimonatl. - Bibliogr. Deskription nach Vol. 10, Issue 2 (2004).
Description: Online-Ressource

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