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Chemistry in microelectronics

Author: Yannick Le Tiec
Publisher: London : ISTE Ltd : John Wiley & Sons Inc, 2013.
Series: Electronics engineering series.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:

Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing  Read more...

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Genre/Form: Electronic books
Additional Physical Format: Print version:
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Yannick Le Tiec
ISBN: 9781848214361 1848214367 9781299277304 1299277306 9781118578070 1118578074 9781118578070
OCLC Number: 830512261
Description: 1 online resource (384 pages).
Contents: Chemistry in the "Front end of the line" (FEOL) / François Martin, Jean-Michel Hartmann, Véronique Carron, Yannick Le Tiec --
Chemistry in interconnects / Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean, Didier Louis --
The chemistry of wet surface preparation / Yannick Le Tiec, Martin Knotter --
The use and management of chemical fluids in microelectronics / Christiane Gottschalk, Kevin McLaughlin, Julie Cren, Catherine Peyne, Patrick Valenti --
Surface functionalization for micro- and nanosystems / Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues, Francoise Vinet.
Series Title: Electronics engineering series.
Responsibility: edited by Yannick Le Tiec.

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