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Chemistry in microelectronics

Author: Yannick Le Tiec
Publisher: London : ISTE, 2013.
Series: Electronics engineering series
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:

Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing  Read more...

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Genre/Form: Electronic books
Additional Physical Format: Print version:
Chemistry in microelectronics.
London : ISTE, 2013
(DLC) 2012955113
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Yannick Le Tiec
ISBN: 9781118580141 1118580141
OCLC Number: 841168731
Description: 1 online resource (xii, 372 pages) : illustrations.
Contents: Preface ix Chapter 1. Chemistry in the "Front End of the Line" (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts 1 Francois MARTIN, Jean-Michel HARTMANN, Veronique CARRON and Yannick LE TIEC 1.1. Introduction 1 1.2. Arrangement of the gate 3 1.3. Chemistry of crystalline materials 19 1.4. Contact areas between the gate and the "source" and "drain" 38 1.5. General conclusion 57 1.6. List of Abbreviations 58 1.7. Bibliography 59 Chapter 2. Chemistry in Interconnects 81 Vincent JOUSSEAUME, Paul-Henri HAUMESSER, Carole PERNEL, Jeffery BUTTERBAUGH, Sylvain MAITREJEAN and Didier LOUIS 2.1. Introduction 81 2.2. Interconnects: generalities and background 83 2.3. Dielectric deposits 99 2.4. Deposition and properties of metal layers for interconnect structures 122 2.5. Cleaning process for copper interconnects 144 2.6. General conclusions and perspectives 161 2.7. List of Abbreviations 164 2.8. Bibliography 165 Chapter 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying 187 Yannick LE TIEC and Martin KNOTTER 3.1. Introduction 187 3.2. Cleaning 188 3.3. Wet etching 202 3.4. Rinsing and drying 214 3.5. Conclusion 224 3.6. List of Abbreviations 225 3.7. Bibliography 225 Chapter 4. The Use and Management of Chemical Fluids in Microelectronics 233 Christiane GOTTSCHALK, Kevin MCLAUGHLIN, Julie CREN, Catherine PEYNE and Patrick VALENTI 4.1. Ultrapure water 233 4.2. Gases for semiconductors 251 4.3. Dissolved gases 268 4.4. High-purity chemicals 283 4.5. Waste management 290 4.6. List of Abbreviations 301 4.7. Bibliography 303 Chapter 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors 309 Antoine HOANG, Gilles MARCHAND, Guillaume NONGLATON, Isabelle TEXIER-NOGUES and Francoise VINET 5.1. Introduction 309 5.2. Materials 310 5.3. Functionalization process 317 5.4. Molecule and macromolecule immobilization 332 5.5. Analytes capture 340 5.6. Conclusion 348 5.7. List of Abbreviations 349 5.8. Bibliography 349 List of Authors 361 Index 363
Series Title: Electronics engineering series
Responsibility: edited by Yannick Le Tiec.

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