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Conference on Earth Station Technology, 14-16 October 1970.

Author: Institution of Electrical Engineers. Electronics Division.; Institute of Electrical and Electronics Engineers.; Institution of Electronic and Radio Engineers.
Publisher: London, Institution of Electrical Engineers [1970]
Series: Institution of Electrical Engineers, London.; I.E.E. conference publication
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Summary:

Silicon-on-insulator (SOI) technology in microelectronics is proliferating and is ready to be applied in a growing number of IC fabrication situations. Bonding of single crystal Si to dielectrics,  Read more...

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Genre/Form: Kongress
Additional Physical Format: Online version:
Conference on Earth Station Technology (1970 : London, England).
Conference on Earth Station Technology, 14-16 October 1970.
London, Institution of Electrical Engineers [1970]
(OCoLC)762969317
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Institution of Electrical Engineers. Electronics Division.; Institute of Electrical and Electronics Engineers.; Institution of Electronic and Radio Engineers.
ISBN: 0852960395 9780852960394
OCLC Number: 155292
Description: 446 pages illustrations 30 cm.
Contents: Chapter 1: Principles of wafer bondingChapter 2: Bond, grind-back and polish SOIChapter 3: Smart Cut (R): the technology used for high volume SOI wafer productionChapter 4: ELTRAN (R) (SOI-Epi waferTM) technologyChapter 5: Wafer characterizationChapter 6: Advanced applications of wafer bondingAppendix 1: A manufacturing process for silicon-on-silicon wafer bondingAppendix 2: GlossaryAppendix 3: Comparison of bonded wafer technologiesAppendix 4: Further reading and websites
Series Title: Institution of Electrical Engineers, London.; I.E.E. conference publication
Responsibility: Organised by the Electronics Division of the Institution of Electrical Engineers in association with the Institute of Electrical and Electronics Engineers, [and] the Institution of Electronic and Radio Engineers.

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