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Conference proceedings : 1998 International Conference on Indium Phosphide and Related Materials : May 11-15, 1998, University of Tsukuba, University Hall, Tsukuba, Ibaraki, JAPAN

Author: Ōyō Butsuri Gakkai.; Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers); IEEE Electron Devices Society.
Publisher: [New York, N.Y.] : Institute of Electrical and Electronics Engineers ; Piscataway, N.J. : IEEE Service Center, ©1998.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Summary:

This text examines test structures for microelectronic devices, their recent progress and future directions. It places an emphasis on such topics as: process characterization; dimensional  Read more...

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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Ōyō Butsuri Gakkai.; Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers); IEEE Electron Devices Society.
ISBN: 0780342208 9780780342200 0780342216 9780780342217 0780342224 9780780342224
OCLC Number: 39683812
Notes: "IEEE Catalog # 98CH36129."
Description: xvi, 849 pages : illustrations ; 28 cm
Other Titles: Indium Phosphide and Related Materials, 1998 International Conference on.
1998 International Conference on Indium Phosphide and Related Materials
IPRM '98
Indium Phosphide and Related Materials
Responsibility: sponsored by the Japan Society of Applied Physics, IEEE/Lasers and Electro-Optics Society, IEEE/Electron Devices Society.

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