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Contamination Control and Cleanrooms : Problems, Engineering Solutions, and Applications

Author: Alvin Lieberman
Publisher: Boston, MA : Springer US, 1992.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
Contamination control standards and techniques for all phases of the production of high-technology products are spelled out in this applications-orientated guide. Practical cleaning methods for products and process fluids are accompanied by tips on selecting operations based on economy and efficiency. Explanations of contaminant measurement devices cover operation, error sources and remedial methods. Engineers will  Read more...
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Details

Genre/Form: Electronic books
Additional Physical Format: Print version:
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Alvin Lieberman
ISBN: 9781468465129 1468465120
OCLC Number: 852788680
Description: 1 online resource (424 pages)
Contents: 1 Contamination Control Overview --
2 Particulate Contaminant Descriptions and Definitions --
3 Particle Effects on Products --
Appendix Contaminant Effects on Mechanical Parameters Summary --
4 Gaseous, Chemical, and Other Contaminant Descriptions --
5 Contaminant Sources --
6 Contaminant-Generation Mechanisms --
7 Contaminant Transport and Deposition Mechanisms --
8 Product Protection Methods Summary --
9 Liquid Cleaning Methods --
10 Gas Cleaning Methods for Ambient Air and Compressed Gases --
11 Surface Cleaning Methods --
12 Standards for Contamination Control Areas --
13 Verification and Monitoring: Requirements and Procedures --
14 Standards for Contamination Control Testing Systems --
15 Cleanroom Design Bases and Allowable Components --
16 HVAC Filter and Flow Control Systems for Cleanrooms --
17 Cleanroom Work Support Component Areas --
18 Cleaning, Maintenance, and Janitorial Needs --
19 Component and Equipment Testing --
20 Personnel Selection and Training --
21 Clothing, Gloves, and Wipers --
22 Gas Sampling Considerations --
23 Optical Airborne Particle Counter Operation --
24 Optical Measurement of Deposited Particles --
25 Optical Liquidborne Particle Counter Operation --
26 Optical Particle Counter Operating Procedures, Calibration and Correlation Methods --
27 Optical Particle Counter Errors and Problem Areas --
Good Signal-to-Noise Ratio --
Adequate Particle-Sizing Sensitivity --
Maximum Particle-Sizing Accuracy --
Acceptable Particle-Sizing Resolution --
Adequate Particle-Counting Accuracy --
Maximum Sample Size or Volumetric Flow Rate --
Maximum Particle Concentration Capability --
Minimum Data Processing Time --
Correlation with Other Instruments --
Adequate Particle Size Definition Range --
Other OPC Specifications --
28 Gas Filter Testing Methods --
29 Liquids: A Cleaning Overview --
30 Particulate Contamination Measurement in Liquids.
Responsibility: by Alvin Lieberman.

Abstract:

Contamination control standards and techniques for all phases of the production of high-technology products are spelled out in this applications-orientated guide. Engineers will find vital data on  Read more...

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