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Database needs for modeling and simulation of plasma processing

Author: National Research Council (U.S.). Panel on Database Needs in Plasma Processing.
Publisher: Washington, D.C. : National Academy Press, 1996.
Series: Compass series (Washington, D.C.)
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Electronic books
Congresses
Congrès
Additional Physical Format: Print version:
Database needs for modeling and simulation of plasma processing.
Washington, D.C. : National Academy Press, 1996
(DLC) 96070732
(OCoLC)36176538
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: National Research Council (U.S.). Panel on Database Needs in Plasma Processing.
ISBN: 0585084548 9780585084541
OCLC Number: 43475625
Description: 1 online resource (64 pages).
Contents: 1 Front Matter; 2 Executive Summary; 3 1 Industrial Perspectives; 4 2 Tool Scale and Feature Scale Models; 5 3 Radiative Processes and Diagnostics; 6 4 Heterogeneous Processes; 7 5 Electron Collision Processes; 8 6 Ion Processes, Neutral Chemistry, and Thermochemical Data; 9 Appendix A: Acronyms and Abbreviations; 10 Appendix B: Workshop Agenda; 11 Appendix C: Workshop Participants
Series Title: Compass series (Washington, D.C.)
Responsibility: Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

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