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Defect recognition and image processing in semiconductors 1997 : proceedings of the 7th International Conference on Defect Recognition and Image Processing in Semiconductors (DRIP VII) held in Templin, Germany, 7-10 September 1997

Author: J Donecker; I Rechenberg
Publisher: Bristol ; Philadelphia : Institute of Physics Pub., 1998.
Series: Institute of Physics conference series, no. 160.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Summary:

Presents an overview of techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This book addresses advances in defect  Read more...

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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: J Donecker; I Rechenberg
ISBN: 0750305002 9780750305006
OCLC Number: 38130571
Description: xx, 524 pages : illustrations ; 24 cm.
Contents: Preface. Glossary. Nanoscanning (9 papers). Electron beam methods (9 papers). Optical methods (8 papers). Mapping (10 papers). X-ray methods (4 papers). Other and combined methods (8 papers). Image processing. Standardization. Si and SiGe mixed crystals (15 papers). SiC (3 papers). GaN (6 papers). Other III-V compounds (12 papers). II-VI compounds, phosphors, oxides and alternative substrates (4 papers). Processing and defects (3 papers). Defect recognition in devices and degradation (11 papers). Author and subject indices.
Series Title: Institute of Physics conference series, no. 160.
Responsibility: edited by J. Donecker and I. Rechneberg.
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listed in SPIE-OE Reports No 174, 1998 listed in Scitech Book News, September 1998 Abstracted in INSPEC Database. in SPIE-OE Reports No 174, 1998 listed in Scitech Book News, September 1998 Read more...

 
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