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The design of high performance mechatronics : high-tech functionality by multidisciplinary system integration

Author: Robert Munnig Schmidt; IOS Press.
Publisher: Amsterdam : Delft University Press, 2014. ©2014
Edition/Format:   eBook : Document : English : 2nd revised editionView all editions and formats
Summary:
Since they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integration of electronics, control systems and electric drives. This book deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Design of high performance mechatronics.
Amsterdam : Delft University Press, 2014
(DLC) 2013454916
(OCoLC)880122256
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Robert Munnig Schmidt; IOS Press.
ISBN: 9781614993681 1614993688
OCLC Number: 872097072
Description: 1 online resource (xxv, 901 pages) : illustrations
Contents: Mechatronics in the Dutch high-tech industry --
Applied physics in mechatronic systems --
Dynamics of motion system --
Motion control --
Electromechanic actuators --
Analogue electronics in mechatronic systems --
Optics in mechatronic systems --
Measurement in mechatronic systems --
Precision positioning in wafer scanners.
Responsibility: Robert Munnig Schmidt, Georg Schitter, Adrian Rankers, Jan van Eijk.

Abstract:

Since they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integration of electronics, control systems and electric drives. This book deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the continuous shrink in detailing of micro-electronics and MEMS. As well as the more frequently presented standard subjects of dynamics, motion control, electronics and electromechanics, this.

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