skip to content
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May 2002, Cannes, France Preview this item
ClosePreview this item
Checking...

Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May 2002, Cannes, France

Author: B Courtois; Laboratoire TIMA.; Society of Photo-optical Instrumentation Engineers.
Publisher: Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©2002.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 4755.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Summary:

This volume examines the design, test, integration and packaging of MEMS/MOEMS 2002.

Rating:

(not yet rated) 0 with reviews - Be the first.

Subjects
More like this

 

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...

Details

Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: B Courtois; Laboratoire TIMA.; Society of Photo-optical Instrumentation Engineers.
ISBN: 0819445185 9780819445186
OCLC Number: 50034635
Description: xvii, 832 pages : illustrations ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 4755.
Other Titles: MEMS/MOEMS 2002
Responsibility: Bernard Courtois [and others], chairs/editors ; sponsored by Tima, CNRS-INPG-UJF (France) [and others].

Reviews

User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data


Primary Entity

<http://www.worldcat.org/oclc/50034635> # Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May 2002, Cannes, France
    a schema:Book, schema:CreativeWork ;
    library:oclcnum "50034635" ;
    library:placeOfPublication <http://id.loc.gov/vocabulary/countries/wau> ;
    library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/763651460#Place/bellingham_wash> ; # Bellingham, Wash.
    schema:about <http://experiment.worldcat.org/entity/work/data/763651460#Topic/microelectronic_packaging> ; # Microelectronic packaging
    schema:about <http://experiment.worldcat.org/entity/work/data/763651460#Topic/optoelectronic_devices> ; # Optoelectronic devices
    schema:about <http://experiment.worldcat.org/entity/work/data/763651460#Topic/micromachining> ; # Micromachining
    schema:about <http://experiment.worldcat.org/entity/work/data/763651460#Topic/microelectromechanical_systems> ; # Microelectromechanical systems
    schema:about <http://id.worldcat.org/fast/1019751> ; # Microelectronic packaging
    schema:about <http://id.worldcat.org/fast/1019888> ; # Micromachining
    schema:about <http://id.worldcat.org/fast/1046908> ; # Optoelectronic devices
    schema:about <http://id.worldcat.org/fast/1019745> ; # Microelectromechanical systems
    schema:alternateName "MEMS/MOEMS 2002" ;
    schema:bookFormat bgn:PrintBook ;
    schema:contributor <http://viaf.org/viaf/202735135> ; # Bernard Courtois
    schema:contributor <http://viaf.org/viaf/151856603> ; # Society of Photo-optical Instrumentation Engineers.
    schema:contributor <http://viaf.org/viaf/262464753> ; # Laboratoire TIMA.
    schema:copyrightYear "2002" ;
    schema:datePublished "2002" ;
    schema:exampleOfWork <http://worldcat.org/entity/work/id/763651460> ;
    schema:genre "Conference papers and proceedings"@en ;
    schema:genre "Conference publication"@en ;
    schema:inLanguage "en" ;
    schema:isPartOf <http://experiment.worldcat.org/entity/work/data/763651460#Series/proceedings_of_spie_the_international_society_for_optical_engineering> ; # Proceedings of SPIE--the International Society for Optical Engineering ;
    schema:isPartOf <http://experiment.worldcat.org/entity/work/data/763651460#Series/spie_proceedings_series> ; # SPIE proceedings series ;
    schema:name "Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May 2002, Cannes, France"@en ;
    schema:productID "50034635" ;
    schema:publication <http://www.worldcat.org/title/-/oclc/50034635#PublicationEvent/bellingham_wash_society_of_photo_optical_instrumentation_engineers_2002> ;
    schema:publisher <http://experiment.worldcat.org/entity/work/data/763651460#Agent/society_of_photo_optical_instrumentation_engineers> ; # Society of Photo-optical Instrumentation Engineers
    schema:workExample <http://worldcat.org/isbn/9780819445186> ;
    wdrs:describedby <http://www.worldcat.org/title/-/oclc/50034635> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/763651460#Agent/society_of_photo_optical_instrumentation_engineers> # Society of Photo-optical Instrumentation Engineers
    a bgn:Agent ;
    schema:name "Society of Photo-optical Instrumentation Engineers" ;
    .

<http://experiment.worldcat.org/entity/work/data/763651460#Place/bellingham_wash> # Bellingham, Wash.
    a schema:Place ;
    schema:name "Bellingham, Wash." ;
    .

<http://experiment.worldcat.org/entity/work/data/763651460#Series/proceedings_of_spie_the_international_society_for_optical_engineering> # Proceedings of SPIE--the International Society for Optical Engineering ;
    a bgn:PublicationSeries ;
    schema:hasPart <http://www.worldcat.org/oclc/50034635> ; # Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May 2002, Cannes, France
    schema:name "Proceedings of SPIE--the International Society for Optical Engineering ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/763651460#Series/spie_proceedings_series> # SPIE proceedings series ;
    a bgn:PublicationSeries ;
    schema:hasPart <http://www.worldcat.org/oclc/50034635> ; # Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May 2002, Cannes, France
    schema:name "SPIE proceedings series ;" ;
    .

<http://id.worldcat.org/fast/1019745> # Microelectromechanical systems
    a schema:Intangible ;
    schema:name "Microelectromechanical systems"@en ;
    .

<http://id.worldcat.org/fast/1019751> # Microelectronic packaging
    a schema:Intangible ;
    schema:name "Microelectronic packaging"@en ;
    .

<http://id.worldcat.org/fast/1019888> # Micromachining
    a schema:Intangible ;
    schema:name "Micromachining"@en ;
    .

<http://id.worldcat.org/fast/1046908> # Optoelectronic devices
    a schema:Intangible ;
    schema:name "Optoelectronic devices"@en ;
    .

<http://viaf.org/viaf/151856603> # Society of Photo-optical Instrumentation Engineers.
    a schema:Organization ;
    schema:name "Society of Photo-optical Instrumentation Engineers." ;
    .

<http://viaf.org/viaf/202735135> # Bernard Courtois
    a schema:Person ;
    schema:familyName "Courtois" ;
    schema:givenName "Bernard" ;
    schema:givenName "B." ;
    schema:name "Bernard Courtois" ;
    .

<http://viaf.org/viaf/262464753> # Laboratoire TIMA.
    a schema:Organization ;
    schema:name "Laboratoire TIMA." ;
    .

<http://worldcat.org/isbn/9780819445186>
    a schema:ProductModel ;
    schema:isbn "0819445185" ;
    schema:isbn "9780819445186" ;
    .

<http://www.worldcat.org/title/-/oclc/50034635>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
    schema:about <http://www.worldcat.org/oclc/50034635> ; # Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May 2002, Cannes, France
    schema:dateModified "2018-02-15" ;
    void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .


Content-negotiable representations

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.