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Developments in semiconductor microlithography IV : April 23-24, 1979, San Jose, California

Author: Jim Dey; Northern California Microphotomask/Masking Working Group.
Publisher: Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1979.
Series: Proceedings of the Society of Photo-optical Instrumentation Engineers, v. 174.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Print version:
Developments in semiconductor microlithography IV.
Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1979
(DLC) 80105579
(OCoLC)6144988
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Jim Dey; Northern California Microphotomask/Masking Working Group.
OCLC Number: 714673015
Reproduction Notes: Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2011. MiAaHDL
Description: 1 online resource (vi, 194 pages) : illustrations.
Details: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Series Title: Proceedings of the Society of Photo-optical Instrumentation Engineers, v. 174.
Responsibility: Jim Dey, editor ; cooperating organization, Northern California Microphotomask/Masking Working Group.

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Primary Entity

<http://www.worldcat.org/oclc/714673015> # Developments in semiconductor microlithography IV : April 23-24, 1979, San Jose, California
    a schema:MediaObject, schema:CreativeWork, schema:Book ;
   library:oclcnum "714673015" ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/17063496#Place/bellingham_wash> ; # Bellingham, Wash.
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/wau> ;
   schema:about <http://experiment.worldcat.org/entity/work/data/17063496#Topic/microlithography> ; # Microlithography
   schema:about <http://dewey.info/class/621.38174/> ;
   schema:about <http://experiment.worldcat.org/entity/work/data/17063496#Topic/microelectronics> ; # Microelectronics
   schema:about <http://id.worldcat.org/fast/1019883> ; # Microlithography
   schema:about <http://id.loc.gov/authorities/subjects/sh85134862> ; # Thin-film circuits
   schema:about <http://id.worldcat.org/fast/1150057> ; # Thin-film circuits
   schema:about <http://id.worldcat.org/fast/1019757> ; # Microelectronics
   schema:about <http://experiment.worldcat.org/entity/work/data/17063496#Topic/semiconductors> ; # Semiconductors
   schema:about <http://id.worldcat.org/fast/1112198> ; # Semiconductors
   schema:bookFormat schema:EBook ;
   schema:contributor <http://viaf.org/viaf/139548559> ; # Northern California Microphotomask/Masking Working Group.
   schema:contributor <http://viaf.org/viaf/3765200> ; # Jim Dey
   schema:copyrightYear "1979" ;
   schema:datePublished "1979" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/17063496> ;
   schema:genre "Conference publication"@en ;
   schema:genre "Conference papers and proceedings"@en ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/17063496#Series/proceedings_of_the_society_of_photo_optical_instrumentation_engineers> ; # Proceedings of the Society of Photo-optical Instrumentation Engineers ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/6144988> ;
   schema:name "Developments in semiconductor microlithography IV : April 23-24, 1979, San Jose, California"@en ;
   schema:productID "714673015" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/714673015#PublicationEvent/bellingham_wash_society_of_photo_optical_instrumentation_engineers_1979> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/17063496#Agent/society_of_photo_optical_instrumentation_engineers> ; # Society of Photo-optical Instrumentation Engineers
   schema:url <http://catalog.hathitrust.org/api/volumes/oclc/6144988.html> ;
   schema:url <http://proceedings.spiedigitallibrary.org/volume.aspx?volume=0174> ;
   schema:url <http://link.spie.org/PSISDG/0174/1> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/714673015> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/17063496#Agent/society_of_photo_optical_instrumentation_engineers> # Society of Photo-optical Instrumentation Engineers
    a bgn:Agent ;
   schema:name "Society of Photo-optical Instrumentation Engineers" ;
    .

<http://experiment.worldcat.org/entity/work/data/17063496#Place/bellingham_wash> # Bellingham, Wash.
    a schema:Place ;
   schema:name "Bellingham, Wash." ;
    .

<http://experiment.worldcat.org/entity/work/data/17063496#Series/proceedings_of_the_society_of_photo_optical_instrumentation_engineers> # Proceedings of the Society of Photo-optical Instrumentation Engineers ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/714673015> ; # Developments in semiconductor microlithography IV : April 23-24, 1979, San Jose, California
   schema:name "Proceedings of the Society of Photo-optical Instrumentation Engineers ;" ;
    .

<http://id.loc.gov/authorities/subjects/sh85134862> # Thin-film circuits
    a schema:Intangible ;
   schema:name "Thin-film circuits"@en ;
    .

<http://id.worldcat.org/fast/1019757> # Microelectronics
    a schema:Intangible ;
   schema:name "Microelectronics"@en ;
    .

<http://id.worldcat.org/fast/1019883> # Microlithography
    a schema:Intangible ;
   schema:name "Microlithography"@en ;
    .

<http://id.worldcat.org/fast/1112198> # Semiconductors
    a schema:Intangible ;
   schema:name "Semiconductors"@en ;
    .

<http://id.worldcat.org/fast/1150057> # Thin-film circuits
    a schema:Intangible ;
   schema:name "Thin-film circuits"@en ;
    .

<http://viaf.org/viaf/139548559> # Northern California Microphotomask/Masking Working Group.
    a schema:Organization ;
   schema:name "Northern California Microphotomask/Masking Working Group." ;
    .

<http://viaf.org/viaf/3765200> # Jim Dey
    a schema:Person ;
   schema:familyName "Dey" ;
   schema:givenName "Jim" ;
   schema:name "Jim Dey" ;
    .

<http://www.worldcat.org/oclc/6144988>
    a schema:CreativeWork ;
   rdfs:label "Developments in semiconductor microlithography IV." ;
   schema:description "Print version:" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/714673015> ; # Developments in semiconductor microlithography IV : April 23-24, 1979, San Jose, California
    .

<http://www.worldcat.org/title/-/oclc/714673015>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
   schema:about <http://www.worldcat.org/oclc/714673015> ; # Developments in semiconductor microlithography IV : April 23-24, 1979, San Jose, California
   schema:dateModified "2017-09-04" ;
   void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .


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