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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Jung-Chih Chiao; Society of Photo-optical Instrumentation Engineers.; United States. Air Force. Asian Office of Aerospace Research and Development.; Institute of Electrical and Electronics Engineers. South Australia Section.
ISBN: 0819443220 9780819443229
OCLC Number: 49052655
Description: xi, 538 pages : illustrations ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 4592.
Responsibility: Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development [and others] ; cooperating organization, IEEE South Australia Section.

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Primary Entity

<http://www.worldcat.org/oclc/49052655> # Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia
    a schema:CreativeWork, schema:Book ;
    library:oclcnum "49052655" ;
    library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/366502792#Place/bellingham_wash> ; # Bellingham, Wash.
    library:placeOfPublication <http://id.loc.gov/vocabulary/countries/wau> ;
    schema:about <http://experiment.worldcat.org/entity/work/data/366502792#Topic/microelectromechanical_systems> ; # Microelectromechanical systems
    schema:about <http://dewey.info/class/621.381/e22/> ;
    schema:about <http://id.worldcat.org/fast/1062062> ; # Photon detectors--Design and construction
    schema:about <http://id.loc.gov/authorities/subjects/sh85101381> ; # Photomechanical processes
    schema:about <http://id.loc.gov/authorities/subjects/sh85101379> ; # Photolithography
    schema:about <http://id.worldcat.org/fast/1062039> ; # Photomechanical processes
    schema:about <http://id.worldcat.org/fast/1019745> ; # Microelectromechanical systems
    schema:about <http://experiment.worldcat.org/entity/work/data/366502792#Topic/photon_detectors_design_and_construction> ; # Photon detectors--Design and construction
    schema:about <http://id.worldcat.org/fast/1062032> ; # Photolithography
    schema:bookFormat bgn:PrintBook ;
    schema:contributor <http://viaf.org/viaf/128023344> ; # United States. Air Force. Asian Office of Aerospace Research and Development.
    schema:contributor <http://viaf.org/viaf/151856603> ; # Society of Photo-optical Instrumentation Engineers.
    schema:contributor <http://viaf.org/viaf/150922777> ; # Institute of Electrical and Electronics Engineers. South Australia Section.
    schema:contributor <http://experiment.worldcat.org/entity/work/data/366502792#Person/chiao_jung_chih> ; # Jung-Chih Chiao
    schema:copyrightYear "2001" ;
    schema:datePublished "2001" ;
    schema:exampleOfWork <http://worldcat.org/entity/work/id/366502792> ;
    schema:genre "Conference papers and proceedings"@en ;
    schema:genre "Conference publication"@en ;
    schema:inLanguage "en" ;
    schema:isPartOf <http://experiment.worldcat.org/entity/work/data/366502792#Series/proceedings_of_spie_the_international_society_for_optical_engineering> ; # Proceedings of SPIE--the International Society for Optical Engineering ;
    schema:isPartOf <http://experiment.worldcat.org/entity/work/data/366502792#Series/spie_proceedings_series> ; # SPIE proceedings series ;
    schema:name "Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia"@en ;
    schema:productID "49052655" ;
    schema:publication <http://www.worldcat.org/title/-/oclc/49052655#PublicationEvent/bellingham_wash_spie_2001> ;
    schema:publisher <http://experiment.worldcat.org/entity/work/data/366502792#Agent/spie> ; # SPIE
    schema:url <http://link.spie.org/PSISDG/4592/1> ;
    schema:workExample <http://worldcat.org/isbn/9780819443229> ;
    wdrs:describedby <http://www.worldcat.org/title/-/oclc/49052655> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/366502792#Person/chiao_jung_chih> # Jung-Chih Chiao
    a schema:Person ;
    schema:familyName "Chiao" ;
    schema:givenName "Jung-Chih" ;
    schema:name "Jung-Chih Chiao" ;
    .

<http://experiment.worldcat.org/entity/work/data/366502792#Place/bellingham_wash> # Bellingham, Wash.
    a schema:Place ;
    schema:name "Bellingham, Wash." ;
    .

<http://experiment.worldcat.org/entity/work/data/366502792#Series/proceedings_of_spie_the_international_society_for_optical_engineering> # Proceedings of SPIE--the International Society for Optical Engineering ;
    a bgn:PublicationSeries ;
    schema:hasPart <http://www.worldcat.org/oclc/49052655> ; # Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia
    schema:name "Proceedings of SPIE--the International Society for Optical Engineering ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/366502792#Series/spie_proceedings_series> # SPIE proceedings series ;
    a bgn:PublicationSeries ;
    schema:hasPart <http://www.worldcat.org/oclc/49052655> ; # Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia
    schema:name "SPIE proceedings series ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/366502792#Topic/photon_detectors_design_and_construction> # Photon detectors--Design and construction
    a schema:Intangible ;
    schema:hasPart <http://id.loc.gov/authorities/subjects/sh85101389> ;
    schema:name "Photon detectors--Design and construction"@en ;
    .

<http://id.loc.gov/authorities/subjects/sh85101379> # Photolithography
    a schema:Intangible ;
    schema:name "Photolithography"@en ;
    .

<http://id.loc.gov/authorities/subjects/sh85101381> # Photomechanical processes
    a schema:Intangible ;
    schema:name "Photomechanical processes"@en ;
    .

<http://id.worldcat.org/fast/1019745> # Microelectromechanical systems
    a schema:Intangible ;
    schema:name "Microelectromechanical systems"@en ;
    .

<http://id.worldcat.org/fast/1062032> # Photolithography
    a schema:Intangible ;
    schema:name "Photolithography"@en ;
    .

<http://id.worldcat.org/fast/1062039> # Photomechanical processes
    a schema:Intangible ;
    schema:name "Photomechanical processes"@en ;
    .

<http://id.worldcat.org/fast/1062062> # Photon detectors--Design and construction
    a schema:Intangible ;
    schema:name "Photon detectors--Design and construction"@en ;
    .

<http://link.spie.org/PSISDG/4592/1>
    rdfs:comment "Rutgers restricted." ;
    .

<http://viaf.org/viaf/128023344> # United States. Air Force. Asian Office of Aerospace Research and Development.
    a schema:Organization ;
    schema:name "United States. Air Force. Asian Office of Aerospace Research and Development." ;
    .

<http://viaf.org/viaf/150922777> # Institute of Electrical and Electronics Engineers. South Australia Section.
    a schema:Organization ;
    schema:name "Institute of Electrical and Electronics Engineers. South Australia Section." ;
    .

<http://viaf.org/viaf/151856603> # Society of Photo-optical Instrumentation Engineers.
    a schema:Organization ;
    schema:name "Society of Photo-optical Instrumentation Engineers." ;
    .

<http://worldcat.org/isbn/9780819443229>
    a schema:ProductModel ;
    schema:isbn "0819443220" ;
    schema:isbn "9780819443229" ;
    .

<http://www.worldcat.org/title/-/oclc/49052655>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
    schema:about <http://www.worldcat.org/oclc/49052655> ; # Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia
    schema:dateModified "2017-11-17" ;
    void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .


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