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Digest of papers microprocesses and nanotechnology 2005 : 2005 International Microprocesses and Nanotechnology Conference : October 25-28, 2005, Conference (October 25 technical seminar, 26-28 conference) Hotel Beliclassic Tokyo, Japan

Author: IEEE Electron Devices Society.; Ōyō Butsuri Gakkai.; American Vacuum Society.
Publisher: Tokyo, Japan : Japan Society of Applied Physics, ©2005.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Electronic books
Congresses
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: IEEE Electron Devices Society.; Ōyō Butsuri Gakkai.; American Vacuum Society.
OCLC Number: 69966957
Language Note: English.
Notes: Contains advertising material.
"JSAP CAT. No. AP051238"--Copyright page.
"IEEE cat no. 05EX1180"--Copyright page.
Description: 1 online resource (295 pages) : illustrations
Other Titles: Microprocesses and nanotechnology 2005
2005 International Microprocesses and Nanotechnology Conference
Microprocesses and Nanotechnology Conference, 2005 International
Responsibility: sponsored by the Japan Society of Applied Physics ; technical-cosponsored, IEEE Electron Device Society ; cooperation, American Vacuum Society [and others].

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