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  E-mail Message: I thought you might be interested in this item at http://www.worldcat.org/oclc/41913009 Title: Direct simulation Monte Carlo modeling of silicon thin film deposition using supersonic beams Author: Gang Chen Publisher: ©1998. OCLC:41913009

  
  

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Direct simulation Monte Carlo modeling of silicon thin film deposition using supersonic beams

Author:	Gang Chen
Dissertation:	Thesis (Ph. D.)--Cornell University, May, 1998.
Edition/Format:	Thesis/dissertation : Thesis/dissertation : Manuscript  Archival Material : EnglishView all editions and formats
Rating:	(not yet rated) 0 with reviews - Be the first.