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Electromechanics and MEMS

Author: T B Jones; Nenad G Nenadic
Publisher: Cambridge ; New York : Cambridge University Press, 2013.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:
"Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying  Read more...
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Document Type: Book
All Authors / Contributors: T B Jones; Nenad G Nenadic
ISBN: 9780521764834 0521764831
OCLC Number: 801681368
Description: xx, 559 pages : illustrations ; 26 cm
Contents: 1. Introduction --
2. Circuit-based modeling --
3. Capacitive lumped parameter electromechanics --
4. Small-signal capacitive electromechanical systems --
5. Capacitive sensing and resonant drive circuits --
6. Distributed 1-D and 2-D electromechanical structures --
7. Practical MEMS --
8. Electromechanics of piezoelectric elements --
9. Electromechanics of magnetic MEMS devices.
Responsibility: Thomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology.

Abstract:

A comprehensive MEMS textbook, with worked examples and numerous homework problems.  Read more...

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'This is an excellent textbook presenting the fundamentals of electromechanics required by every practising MEMS engineer. The authors treat the arduous concepts of coupled electrical and mechanical Read more...

 
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