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Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA

Author: David F Kyser
Publisher: AMF O'Hare [Chicago], IL : Scanning Electron Microscopy, Inc., ©1984.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Kongress
Congresses
Additional Physical Format: Online version:
Pfefferkorn Conference (1st : 1982 : Monterey, Calif.).
Electron beam interactions with solids for microscopy, microanalysis & microlithography.
AMF O'Hare [Chicago], IL : Scanning Electron Microscopy, Inc., ©1984
(OCoLC)645798323
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: David F Kyser
ISBN: 0931288304 9780931288302
OCLC Number: 10528914
Description: xii, 372 pages : illustrations ; 29 cm
Responsibility: edited by David F. Kyser [and others] ; managing editor, Daniel Halibey.

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Primary Entity

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