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Etching in microsystem technology

Author: J M Köhler
Publisher: Weinheim ; New York : Wiley-VCH, ©1999.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:
Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic
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Additional Physical Format: Online version:
Köhler, J.M. (J. Michael), 1956-
Etching in microsystem technology.
Weinheim ; New York : Wiley-VCH, ©1999
(OCoLC)607204556
Online version:
Köhler, J.M. (J. Michael), 1956-
Etching in microsystem technology.
Weinheim ; New York : Wiley-VCH, ©1999
(OCoLC)632305288
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: J M Köhler
ISBN: 3527295615 9783527295616
OCLC Number: 40684553
Description: xvi, 368 pages : illustrations ; 25 cm
Contents: Preface --
Table of contents --
Symbols --
Abbreviations --
1. Introduction --
2. Distinctive features of microtechnical etching --
3. Wet-chemical etching methods --
4. Dry-etching methods --
5. Microforming by etching of locally changed material --
6. Chosen recipes --
References --
Index.
Other Titles: Ätzverfahren für die Mikrotechnik.
Responsibility: Michael Köhler ; translated by Antje Wiegand.
More information:

Abstract:

Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices. The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching processes coming from chemistry, physics, and engineering. The book is divided into two sections: the wet and dry etching processes are presented in the first general section, which provides the scientific fundamentals, while a catalog of etching bath composition, etching instructions, and parameters can be found in the second section.

This section will enhance the comprehension of the general section and also give an overview of data that are essential in practice.

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Primary Entity

<http://www.worldcat.org/oclc/40684553> # Etching in microsystem technology
    a schema:CreativeWork, schema:Book ;
   bgn:translationOfWork <http://www.worldcat.org/title/-/oclc/40684553#CreativeWork/unidentifiedOriginalWork> ; # Ätzverfahren für die Mikrotechnik.
   library:oclcnum "40684553" ;
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/gw> ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/1362345628#Place/weinheim> ; # Weinheim
   library:placeOfPublication <http://dbpedia.org/resource/New_York_City> ; # New York
   schema:about <http://id.worldcat.org/fast/1011095> ; # Masks (Electronics)
   schema:about <http://experiment.worldcat.org/entity/work/data/1362345628#Topic/mikrosystemtechnik> ; # Mikrosystemtechnik
   schema:about <http://dewey.info/class/621.381531/e21/> ;
   schema:about <http://experiment.worldcat.org/entity/work/data/1362345628#Topic/atzen> ; # Ätzen
   schema:about <http://id.worldcat.org/fast/1066327> ; # Plasma etching
   schema:about <http://id.worldcat.org/fast/1019883> ; # Microlithography
   schema:about <http://experiment.worldcat.org/entity/work/data/1362345628#Topic/circuitos_eletronicos> ; # Circuitos eletrônicos
   schema:bookFormat bgn:PrintBook ;
   schema:copyrightYear "1999" ;
   schema:creator <http://viaf.org/viaf/30183821> ; # J. Michael Köhler
   schema:datePublished "1999" ;
   schema:description "Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices. The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching processes coming from chemistry, physics, and engineering. The book is divided into two sections: the wet and dry etching processes are presented in the first general section, which provides the scientific fundamentals, while a catalog of etching bath composition, etching instructions, and parameters can be found in the second section."@en ;
   schema:description "Preface -- Table of contents -- Symbols -- Abbreviations -- 1. Introduction -- 2. Distinctive features of microtechnical etching -- 3. Wet-chemical etching methods -- 4. Dry-etching methods -- 5. Microforming by etching of locally changed material -- 6. Chosen recipes -- References -- Index."@en ;
   schema:description "This section will enhance the comprehension of the general section and also give an overview of data that are essential in practice."@en ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/1362345628> ; # Ätzverfahren für die Mikrotechnik.
   schema:inLanguage "en" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/632305288> ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/607204556> ;
   schema:name "Etching in microsystem technology"@en ;
   schema:productID "40684553" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/40684553#PublicationEvent/weinheim_new_york_wiley_vch_1999> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/1362345628#Agent/wiley_vch> ; # Wiley-VCH
   schema:url <http://catdir.loc.gov/catdir/toc/wiley022/99233639.html> ;
   schema:workExample <http://worldcat.org/isbn/9783527295616> ;
   umbel:isLike <http://d-nb.info/955954258> ;
   umbel:isLike <http://bnb.data.bl.uk/id/resource/GB99Z3958> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/40684553> ;
    .


Related Entities

<http://dbpedia.org/resource/New_York_City> # New York
    a schema:Place ;
   schema:name "New York" ;
    .

<http://experiment.worldcat.org/entity/work/data/1362345628#Topic/circuitos_eletronicos> # Circuitos eletrônicos
    a schema:Intangible ;
   schema:name "Circuitos eletrônicos"@en ;
    .

<http://id.worldcat.org/fast/1011095> # Masks (Electronics)
    a schema:Intangible ;
   schema:name "Masks (Electronics)"@en ;
    .

<http://id.worldcat.org/fast/1019883> # Microlithography
    a schema:Intangible ;
   schema:name "Microlithography"@en ;
    .

<http://id.worldcat.org/fast/1066327> # Plasma etching
    a schema:Intangible ;
   schema:name "Plasma etching"@en ;
    .

<http://viaf.org/viaf/30183821> # J. Michael Köhler
    a schema:Person ;
   schema:birthDate "1956" ;
   schema:familyName "Köhler" ;
   schema:givenName "J. Michael" ;
   schema:givenName "J. M." ;
   schema:name "J. Michael Köhler" ;
    .

<http://worldcat.org/entity/work/id/1362345628> # Ätzverfahren für die Mikrotechnik.
   schema:name "Ätzverfahren für die Mikrotechnik." ;
    .

<http://worldcat.org/isbn/9783527295616>
    a schema:ProductModel ;
   schema:isbn "3527295615" ;
   schema:isbn "9783527295616" ;
    .

<http://www.worldcat.org/oclc/607204556>
    a schema:CreativeWork ;
   rdfs:label "Etching in microsystem technology." ;
   schema:description "Online version:" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/40684553> ; # Etching in microsystem technology
    .

<http://www.worldcat.org/oclc/632305288>
    a schema:CreativeWork ;
   rdfs:label "Etching in microsystem technology." ;
   schema:description "Online version:" ;
   schema:isSimilarTo <http://www.worldcat.org/oclc/40684553> ; # Etching in microsystem technology
    .

<http://www.worldcat.org/title/-/oclc/40684553#CreativeWork/unidentifiedOriginalWork> # Ätzverfahren für die Mikrotechnik.
    a schema:CreativeWork ;
   schema:inLanguage "de" ;
   schema:name "Ätzverfahren für die Mikrotechnik." ;
    .


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