skip to content
Fundamentals of microfabrication and nanotechnology Preview this item
ClosePreview this item
Checking...

Fundamentals of microfabrication and nanotechnology

Author: Marc J Madou
Publisher: Boca Raton, FL : CRC Press, ©2012.
Edition/Format:   Print book : English : 3rd edView all editions and formats
Database:WorldCat
Summary:
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It
Rating:

(not yet rated) 0 with reviews - Be the first.

Subjects
More like this

 

Find a copy online

Links to this item

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...

Details

Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Marc J Madou
ISBN: 9781420055115 1420055119 9781420055191 1420055194 9781420055160 142005516X 9780849331800 0849331803
OCLC Number: 727047810
Description: 3 v. : ill. (some col.) ; 29 cm.
Contents: V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology --
v. 2. Manufacturing techniques for microfabrication and nanotechnology --
v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
Other Titles: Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Responsibility: Marc J. Madou.

Abstract:

Offers a complete MEMS and NEMS reference. Discussing a variety of approaches, this title includes developments in design packages, DNA and protein array, and fluidics. It also includes a section on  Read more...

Reviews

Editorial reviews

Publisher Synopsis

"... the alpha and omega textbook of micro and nanofabrication and technology. ... Madou's explanations often provide new perspectives to those who are more experienced. ... this feat of compressing Read more...

 
User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data


Primary Entity

<http://www.worldcat.org/oclc/727047810> # Fundamentals of microfabrication and nanotechnology
    a schema:CreativeWork, schema:Book ;
   library:oclcnum "727047810" ;
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/flu> ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/1220251308#Place/boca_raton_fl> ; # Boca Raton, FL
   schema:about <http://experiment.worldcat.org/entity/work/data/1220251308#Topic/fisica_del_estado_solido> ; # Física del estado sólido
   schema:about <http://experiment.worldcat.org/entity/work/data/1220251308#Topic/science_solid_state_physics> ; # SCIENCE--Solid State Physics
   schema:about <http://id.worldcat.org/fast/1125456> ; # Solid state physics
   schema:about <http://experiment.worldcat.org/entity/work/data/1220251308#Topic/technology_&_engineering_nanotechnology_&_mems> ; # TECHNOLOGY & ENGINEERING--Nanotechnology & MEMS
   schema:about <http://experiment.worldcat.org/entity/work/data/1220251308#Topic/sistemas_nanoelectromecanicos> ; # Sistemas nanoelectromecánicos
   schema:about <http://experiment.worldcat.org/entity/work/data/1220251308#Topic/microfluidos> ; # Microfluidos
   schema:about <http://experiment.worldcat.org/entity/work/data/1220251308#Topic/mikrofertigung> ; # Mikrofertigung
   schema:about <http://id.worldcat.org/fast/1019745> ; # Microelectromechanical systems
   schema:about <http://dewey.info/class/620.5/e23/> ;
   schema:about <http://experiment.worldcat.org/entity/work/data/1220251308#Topic/technology_&_engineering_electronics_microelectronics> ; # TECHNOLOGY & ENGINEERING--Electronics--Microelectronics
   schema:about <http://id.worldcat.org/fast/1736696> ; # Microfluidics
   schema:about <http://experiment.worldcat.org/entity/work/data/1220251308#Topic/sistemas_microelectromecanicos> ; # Sistemas microelectromecánicos
   schema:about <http://id.worldcat.org/fast/1741807> ; # Nanoelectromechanical systems
   schema:about <http://experiment.worldcat.org/entity/work/data/1220251308#Topic/nanotechnologie> ; # Nanotechnologie
   schema:alternateName "Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology" ;
   schema:bookEdition "3rd ed." ;
   schema:bookFormat bgn:PrintBook ;
   schema:copyrightYear "2012" ;
   schema:creator <http://experiment.worldcat.org/entity/work/data/1220251308#Person/madou_marc_j> ; # Marc J. Madou
   schema:datePublished "2012" ;
   schema:description "V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications."@en ;
   schema:description ""Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--"@en ;
   schema:description ""In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--"@en ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/1220251308> ;
   schema:hasPart <http://worldcat.org/isbn/9781420055115> ;
   schema:hasPart <http://worldcat.org/isbn/9781420055160> ;
   schema:hasPart <http://worldcat.org/isbn/9781420055191> ;
   schema:inLanguage "en" ;
   schema:name "Fundamentals of microfabrication and nanotechnology"@en ;
   schema:productID "727047810" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/727047810#PublicationEvent/boca_raton_fl_crc_press_c2012> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/1220251308#Agent/crc_press> ; # CRC Press
   schema:workExample <http://worldcat.org/isbn/9780849331800> ;
   umbel:isLike <http://bnb.data.bl.uk/id/resource/GBA8E1445> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/727047810> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/1220251308#Person/madou_marc_j> # Marc J. Madou
    a schema:Person ;
   schema:familyName "Madou" ;
   schema:givenName "Marc J." ;
   schema:name "Marc J. Madou" ;
    .

<http://experiment.worldcat.org/entity/work/data/1220251308#Topic/fisica_del_estado_solido> # Física del estado sólido
    a schema:Intangible ;
   schema:name "Física del estado sólido"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/1220251308#Topic/science_solid_state_physics> # SCIENCE--Solid State Physics
    a schema:Intangible ;
   schema:name "SCIENCE--Solid State Physics"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/1220251308#Topic/sistemas_microelectromecanicos> # Sistemas microelectromecánicos
    a schema:Intangible ;
   schema:name "Sistemas microelectromecánicos"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/1220251308#Topic/sistemas_nanoelectromecanicos> # Sistemas nanoelectromecánicos
    a schema:Intangible ;
   schema:name "Sistemas nanoelectromecánicos"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/1220251308#Topic/technology_&_engineering_electronics_microelectronics> # TECHNOLOGY & ENGINEERING--Electronics--Microelectronics
    a schema:Intangible ;
   schema:name "TECHNOLOGY & ENGINEERING--Electronics--Microelectronics"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/1220251308#Topic/technology_&_engineering_nanotechnology_&_mems> # TECHNOLOGY & ENGINEERING--Nanotechnology & MEMS
    a schema:Intangible ;
   schema:name "TECHNOLOGY & ENGINEERING--Nanotechnology & MEMS"@en ;
    .

<http://id.worldcat.org/fast/1019745> # Microelectromechanical systems
    a schema:Intangible ;
   schema:name "Microelectromechanical systems"@en ;
    .

<http://id.worldcat.org/fast/1125456> # Solid state physics
    a schema:Intangible ;
   schema:name "Solid state physics"@en ;
    .

<http://id.worldcat.org/fast/1736696> # Microfluidics
    a schema:Intangible ;
   schema:name "Microfluidics"@en ;
    .

<http://id.worldcat.org/fast/1741807> # Nanoelectromechanical systems
    a schema:Intangible ;
   schema:name "Nanoelectromechanical systems"@en ;
    .

<http://worldcat.org/isbn/9780849331800>
    a schema:ProductModel ;
   schema:isbn "0849331803" ;
   schema:isbn "9780849331800" ;
    .

<http://worldcat.org/isbn/9781420055115>
    a schema:ProductModel ;
   schema:description "v. 1" ;
   schema:isbn "1420055119" ;
   schema:isbn "9781420055115" ;
    .

<http://worldcat.org/isbn/9781420055160>
    a schema:ProductModel ;
   schema:description "v. 3" ;
   schema:isbn "142005516X" ;
   schema:isbn "9781420055160" ;
    .

<http://worldcat.org/isbn/9781420055191>
    a schema:ProductModel ;
   schema:description "v. 2" ;
   schema:isbn "1420055194" ;
   schema:isbn "9781420055191" ;
    .


Content-negotiable representations

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.